Technology, Principles, and Applications of Inertia Micro-Electro-Mechanical System Technology

机译：惯性微机电系统技术的技术，原理和应用

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This tutorial covers three major topic related to technology, physics, and applications of micro-scale inertial sensors (accelerometers and gyroscopes). The first part provides a basic introduction to technology of MEMS, covering primary questions needed to evaluate micro machining as a technology of choice for inertial micro-sensors. Three technologies, surface micromachining, bulk micromachining, and mixed fabrication processes will be introduced and compared. The second part of the tutorial will be devoted to (ⅰ) overview of research and development efforts worldwide; (ⅱ) introduction to the principles of operation and detection; (ⅲ) review of advantages and challenges; and (ⅳ) speculation about possible future design trends. The tutorial will be concluded by highlighting a wide range of applications enabled by inertial micro-sensors and discuss future opportunities for this sensor technology in medicine, robotics and defense.

机译：本教程涵盖了与微型惯性传感器（加速度计和陀螺仪）的技术，物理和应用相关的三个主要主题。第一部分提供了MEMS技术的基本介绍，涵盖了评估微机械加工作为惯性微传感器选择技术所需的主要问题。将介绍和比较三种技术，即表面微机械加工，体微机械加工和混合制造工艺。本教程的第二部分将专门介绍（ⅰ）全球研究和开发工作；（ⅱ）介绍操作和检测的原理；（ⅲ）审查优势和挑战；（ⅳ）对未来可能的设计趋势的猜测。本教程将通过重点介绍惯性微传感器实现的广泛应用来结束，并讨论该传感器技术在医学，机器人技术和国防领域的未来机会。

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来源
《Conference on Sensors and Their Applications; 20030902-20030904; Limerick; IE》|2003年|P.477-484|共8页
会议地点 Limerick(IE)
作者
Achi Ayomipe Celestine;
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作者单位

Kairus Consulting Limited, Lagos, Nigeria;

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原文格式 PDF
正文语种 eng
中图分类应用;
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Technology, Principles, and Applications of Inertia Micro-Electro-Mechanical System Technology

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