Fabrication of aperiodic gratings on Silicon-On-Insulator (SOI) rib waveguides using e-beam lithography

机译：使用电子束光刻技术在绝缘体上硅（SOI）肋形波导上制造非周期性光栅

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摘要

A technique for fabricating aperiodic Bragg gratings in rib waveguides on Silicon-On-Insulator (SOI) is presented. The technique allows flexibility in defining various characteristics of aperiodic gratings so that a full range of optical grating filters can be realized. The fabrication process comprises optical and electron-beam (e-beam) lithography followed by a liftoff and a single Reactive Ion Etch (RIE) to simultaneously produce the waveguide and the embedded grating structure.

机译：提出了一种在绝缘体上硅（SOI）上的肋形波导中制造非周期性布拉格光栅的技术。该技术允许灵活地定义非周期性光栅的各种特性，从而可以实现整个范围的光栅滤波器。制造过程包括光学和电子束（e-beam）光刻，然后进行剥离和单个反应离子刻蚀（RIE），以同时生产波导和嵌入式光栅结构。

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来源
《Conference on Silicon-Based and Hybrid Optoelectronics Ⅳ Jan 23-24, 2002, San Jose, USA》|2002年|p.45-53|共9页
会议地点 San Jose CA(US)
作者
Venkat R. Subramanian; Ray G. DeCorby; James N. McMullin; Chris J. Haugen; Miroslav Belov;
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作者单位

Department of Electrical Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2V4;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
silicon-on-insulator; WDM optical networks; bragg gratings; wavelength filter; e-beam lithography; liftoff and RIE;

机译：绝缘体上硅WDM光网络；布拉格光栅波长滤波器电子束光刻；剥离和RIE;

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4. Fabrication of aperiodic gratings on Silicon-On-Insulator (SOI) rib waveguides using e-beam lithography [C] . Miroslav Belov, Chris J. Haugen, James N. McMullin, Conference on silicon-based and hybrid optoelectronics . 2002

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5. Thermo-mechanically tunable Bragg grating filters on silicon-on-insulator rib waveguide bridges. [D] . Raum, Christopher R. 2010

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Fabrication of aperiodic gratings on Silicon-On-Insulator (SOI) rib waveguides using e-beam lithography

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