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首页> 外文会议>Conference on Silicon Photonics; 20080121-24; San Jose,CA(US) >Integrated optical biosensors and biochips based on porous silicon technology
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Integrated optical biosensors and biochips based on porous silicon technology

机译：基于多孔硅技术的集成光学生物传感器和生物芯片

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摘要

Micro-total-analysis-systems and lab-on-chip are more than promises in lot of social interest applications such as clinical diagnostic or environmental monitoring. There is an increasing demand of new and customized devices with better performances to be used in very specific applications. Nanostructured Porous silicon is a functional material and a versatile platform for the fabrication of integrated optical microsystems to be used in biochemical analysis. Our research activity is focused on the design, the fabrication and the characterization of several photonic porous silicon based structures, which are used in the sensing of specific molecular interactions. To integrate the porous silicon based optical transducer in biochip devices we have modified standard micromachining processes, such as anodic bonding and photo-patterning, in order to make them consistent to the utilization of biological probes.
机译：微观综合分析系统和片上实验室在许多社会关注的应用（如临床诊断或环境监测）中，远非承诺。对于性能非常高的新的和定制的设备，越来越需要在非常特殊的应用中使用。纳米结构多孔硅是功能材料和多功能平台，可用于制造用于生化分析的集成光学微系统。我们的研究活动集中于几种光子多孔硅基结构的设计，制造和表征，这些结构用于感测特定的分子相互作用。为了将基于多孔硅的光学换能器集成到生物芯片设备中，我们修改了标准的微加工工艺，例如阳极键合和光图案化，以使其与生物探针的利用相一致。

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