Vertically-Integrated Multimode Interferometers for 3-D Photonic Circuits in SOI

机译：SOI中用于3D光子电路的垂直集成多模干涉仪

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We present vertically-integrated multimode interferometers that optically couple between waveguide layers of a three-dimensional photonic circuit. Coupling between these layers can be restricted to certain regions by selectively fabricating a silicon channel between them, resulting in an isolated multimode waveguide section. Simulations reveal that complete coupling between two waveguides that are 2 μm square is achieved over a length of 236 μm, when the separating silicon channel is 1 μm thick. Standard photolithography and etching techniques are used to fabricate a proof-of-concept device consisting of one waveguide coupling into a silicon waveguide that is vertically multimode.

机译：我们提出了垂直集成的多模干涉仪，它们在三维光子电路的波导层之间光学耦合。通过有选择地在它们之间制造硅通道，可以将这些层之间的耦合限制在某些区域，从而形成隔离的多模波导部分。仿真显示，当分离的硅通道的厚度为1μm时，在236μm的长度上可以实现2μm平方的两个波导之间的完全耦合。使用标准的光刻和蚀刻技术来制造概念验证设备，该设备由一个波导耦合到垂直多模硅波导中组成。

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来源
《Conference on Silicon Photonics; 20080121-24; San Jose,CA(US)》|2008年|P.iix|共2页
会议地点 San JoseCA(US)
作者
Chris J. Brooks; Andrew P. Knights; Paul E. Jessop;
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作者单位

McMaster University, Department of Engineering Physics Centre for Emerging Device Technologies (CEDT) 1280 Main Street West, Hamilton, ON, Canada, L8S 4L7;

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原文格式 PDF
正文语种 eng
中图分类半导体光电器件;
关键词
silicon-on-insulator; waveguides; 3-D photonic circuits; multimode interferometers;

机译：绝缘体上硅;波导; 3-D光子电路;多模干涉仪;

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专利

1. Low-Loss Photonic Reservoir Computing with Multimode Photonic Integrated Circuits [J] . Andrew Katumba, Jelle Heyvaert, Bendix Schneider, Scientific reports. . 2018,第1期

机译：采用多模光子集成电路的低损耗光子储层计算
2. Multimode interference-based two-stage 1 /spl times/ 2 light splitter for compact photonic integrated circuits [J] . Masanovic M.L., Skogen E.J., Barton J.S., IEEE Photonics Technology Letters . 2003,第5期

机译：基于多模干涉的两级1 / spl times / 2分光器，用于紧凑型光子集成电路
3. A Dual-parameter Fabry-Perot Interferometer Sensor Based on Single Mode-Photonic Crystal-Multimode Fiber Structure [J] . Zhou Kangpeng, He Wei, Zhang Wen, Instruments and Experimental Techniques . 2019,第3期

机译：基于单模 - 光子晶体 - 多模光纤结构的双参数法布里 - 珀罗干涉仪传感器
4. Vertically-Integrated Multimode Interferometers for 3-D Photonic Circuits in SOI [C] . Chris J. Brooks, Andrew P. Knights, Paul E. Jessop Conference on Silicon Photonics . 2008

机译：用于SOI的三维光子电路的垂直集成的多模织干涉仪
5. Vertically-Integrated Photonic Devices in Silicon-on-Insulator [D] . Brooks, Christopher 2010

机译：绝缘体上硅中的垂直集成光子器件
6. Low-Loss Photonic Reservoir Computing with Multimode Photonic Integrated Circuits [O] . Andrew Katumba, Jelle Heyvaert, Bendix Schneider, -1

机译：采用多模光子集成电路的低损耗光子储层计算
7. Integrated multimode interferometers with arbitrary designs for photonic boson sampling [O] . Andrea Crespi, Roberto Osellame, Roberta Ramponi, 2013

机译：任意集成光子电路中的实验玻色子采样

Vertically-Integrated Multimode Interferometers for 3-D Photonic Circuits in SOI

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