Implications of triple patterning for 14nm node design and patterning

机译：三重图案化对14nm节点设计和图案化的意义

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

The upcoming 14nm logic node will require lithographic patterning of complex layout patterns with minimum pitches of approximately 44nm to 50nm. This requirement is technically feasible by reusing existing 20nm litho-etch-litho-etch (LELE) double patterni

机译：即将到来的14nm逻辑节点将需要对复杂布局图案进行光刻图案化，其最小间距约为44nm至50nm。通过重复使用现有的20nm光刻-平版蚀刻（LELE）双图案技术，该要求在技术上是可行的

著录项

来源
《Design for manufacturability through design-process integration VI.》|2012年|P.03.1-03.12|共12页
会议地点 San Jose CA(US)
作者
Kevin Lucas; Gerard Luk-Pat; Ben Painter;
展开▼
作者单位

Synopsys, Inc. (United States);

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;微电子学、集成电路（IC）;
关键词

相似文献

外文文献
中文文献
专利

1. Reply to Filippo Alongi, Rosario Mazzola, Dario Aiello and Matteo Salgarello's Letter to the Editor re: Re: Daniel E. Spratt, Hebert A. Vargas, Zachary S. Zumsteg, et al. Patterns of Lymph Node Failure after Dose-escalated Radiotherapy: Implications for Extended Pelvic Lymph Node Coverage. Eur Urol 2017; 71: 37-43. A Step Forward in the Era of Functional Imaging? Functional Imaging and Micrometastatic Disease: Implications for Radiotherapy Field Design [J] . Spratt Daniel E., Zelefsky Michael J. European urology . 2017,第4期

机译：回复Filippo，罗萨里奥Mazzola，Dario Aiello和Matteo Salgarello的信Re：Re：Daniel E. Spratt，Hebert A. Vargas，Zachary S. Zumsteg等。剂量升级放射治疗后淋巴结破坏的模式：扩展盆腔淋巴结覆盖的影响。 EUR UROL 2017; 71：37-43。功能性成像时代前进的一步吗？功能性成像和微转移疾病：对放射治疗领域设计的影响
2. Patterns of Lymph Node Metastasis in Differentiated Thyroid Cancer; Clinical Implications with Particular Emphasis on the Emerging Role of Compartment-Oriented Lymph Node Dissection [J] . Sakorafas George H., Koureas Andreas, Mpampali Iliana, Oncology research and treatment. . 2019,第3期

机译：含甲状腺癌中淋巴结转移的模式; 特别强调室内淋巴结解剖的新兴作用的临床意义
3. Re: Daniel E. Spratt, Hebert A. Vargas, Zachary S. Zumsteg, et al. Patterns of Lymph Node Failure after Dose-escalated Radiotherapy: Implications for Extended Pelvic Lymph Node Coverage. Eur Urol 2017; 71: 37-43 A Step Forward in the Era of Functional Imaging? [J] . Alongi Filippo, Mazzola Rosario, Aiello Dario, European urology . 2017,第4期

机译：Re：丹尼尔E. Spratt，Hebert A. Vargas，Zachary S. Zumsteg等等。剂量升级放射治疗后淋巴结破坏的模式：扩展盆腔淋巴结覆盖的影响。 EUR UROL 2017; 71：37-43功能成像时代前进的一步吗？
4. An investigation into Scalability and Compliance for Triple Patterning with Stitches for Metal 1 at the 14nm node [C] . Christopher Cork, Alexander Miloslavsky, Paul Friedberg, Optical microlithography XXVI . 2013

机译：在14nm节点上对金属1的针迹进行三重图案化的可扩展性和合规性研究
5. Spatio-temporal patterns of field-scale soil moisture and their implications for in situ soil moisture network design. [D] . Yang, Lingyuan. 2010

机译：田间土壤水分的时空格局及其对原位土壤水分网络设计的影响。
6. Patterns of Lymph Node Failure after Dose-escalated Radiotherapy: Implications for Extended Pelvic Lymph Node Coverage [O] . Daniel E. Spratt, Hebert A Vargas, Zachary S. Zumsteg, -1

机译：剂量递增放疗后淋巴结衰竭的模式：盆腔淋巴结覆盖范围扩大的含义
7. Patterns of Lymph Node Failure After Dose-Escalated Radiation Therapy in Patients Who Did Not Undergo Pelvic Lymph Node Irradiation: Implications for Extended Pelvic Lymph Node Coverage [O] . D.E. Spratt, H.A. Vargas, Z.S. Zumsteg, 2016

机译：淋巴结术后的淋巴结术后失败，患者未接受骨盆淋巴结辐射的患者：扩展盆腔淋巴结覆盖的影响
8. Variation in Planning Unit-Size and Patterns of Fish Diversity: Implications for Design of Marine Protected Areas [R] . 2010

机译：规划单位变化规模和鱼类多样性模式：对海洋保护区设计的影响

Implications of triple patterning for 14nm node design and patterning

摘要

著录项

相似文献

相关主题

期刊订阅