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Compression Algorithms for 'Dummy Fill' VLSI Layout Data

机译：“虚拟填充” VLSI布局数据的压缩算法

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摘要

Dummy fill is introduced into sparse regions of a VLSI layout to equalize the spatial density of the layout, improving uniformity of chemical-mechanical planarization (CMP). It is now well-known that dummy fill insertion for CMP uniformity changes the back-end flow with respect to layout, parasitic extraction and performance analysis. Of equal import is dummy fill's impact on layout data volume and the manufacturing handoff. For future mask and foundry flows, as well as potential maskless (direct-write) applications, dummy fill layout data must be compressed at factors of 25 or greater. In this work, we propose and assess a number of lossless and lossy compression algorithms for dummy fill. Our methods are based on the building blocks of JBIG approaches - arithmetic coding, soft pattern matching, pattern matching and substitution, etc. We observe that the fill compression problem has a unique "one-sided" characteristic; we propose a technique of achieving one-sided loss by solving an asymmetric cover problem that is of independent interest. Our methods achieve substantial improvements over commercial binary image compression tools especially as fill data size becomes large.
机译：虚拟填充被引入到VLSI布局的稀疏区域中，以均衡布局的空间密度，从而提高化学机械平面化（CMP）的均匀性。众所周知，用于CMP均匀性的虚拟填充插入会改变有关布局，寄生提取和性能分析的后端流程。同样重要的是虚拟填充对布局数据量和制造交接的影响。对于将来的掩膜和铸造流程以及潜在的无掩膜（直接写入）应用程序，必须以25或更大的因子压缩虚拟填充布局数据。在这项工作中，我们提出并评估了许多用于虚拟填充的无损和有损压缩算法。我们的方法基于JBIG方法的构建块-算术编码，软模式匹配，模式匹配和替换等。我们观察到填充压缩问题具有独特的“单面”特性。我们提出了一种通过解决具有独立利益的不对称覆盖问题来实现单面损失的技术。我们的方法相对于商业二进制图像压缩工具实现了重大改进，尤其是当填充数据大小变大时。

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