Design of a MEMS force sensor for quantitative measurement in the nano- to piconewton range

著录项

• 来源
  《Device packaging 2010》|2010年|p.1-6|共6页
• 会议地点 Scottsdale/Fountain Hills AZ(US)
• 作者

  Li-Anne Liew; John M. Moreland; Jonathan R. Pratt;

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• 作者单位

  Materials Reliability Division, National Institute of Standards and Technology, Boulder, CO University of Colorado at Boulder, Dept. of Mechanical Engineering, Boulder, CO;

  Electromagnetics Division, National Institute of Standards and Technology, Boulder, CO;

  Manufacturing Metrology Division, National Institute of Standards and Technology, Gaithersburg, MD;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 制造工艺;
• 关键词

  MEMS; force sensor; SI traceable; nN;

  机译：MEMS ;;力传感器; SI可追溯； nN;