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首页> 外文会议>Dimensional optical metrology and inspection for practical applications II >Spatial fringe analysis based on FFT using only two speckle pattern in ESPI
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Spatial fringe analysis based on FFT using only two speckle pattern in ESPI

机译：在ESPI中仅使用两个散斑图样基于FFT的空间条纹分析

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摘要

High resolution deformation measurement method which requires only two speckle patterns in fringe analysis is proposed. In fringe analysis based on proposed optical system for new method, a pair of real- and imaginary-part components concerning the deformation information can be extracted from one speckle pattern by Fourier transform. The real part is shifted on frequency domain in order to give the information of carrier fringes. Furthermore, the amplitude of the intensity distribution is normalized so that the amplitude becomes one. A specklegram is calculated as a fringe image by the shifted and the non-shifted real parts of information. The fringe image which includes the spatial carrier-information is analyzed by spatial fringe analysis method based on moire fringe analysis. The accuracy of the deformation measurement is efficiently improved by using the spatial fringe analysis method and the normalization of the amplitude. It is confirmed that the method can analyze deformation process with a convex phase distribution in high resolution power.
机译：提出了一种在条纹分析中仅需两个散斑图样的高分辨率变形测量方法。在基于提出的用于新方法的光学系统的条纹分析中，可以通过傅立叶变换从一个散斑图案中提取与变形信息有关的一对实部和虚部分量。实部在频域上移位，以给出载波条纹的信息。此外，强度分布的振幅被归一化，使得振幅变为1。通过信息的平移和非平移实部将散点图计算为条纹图像。通过基于莫尔条纹分析的空间条纹分析方法，对包含空间载波信息的条纹图像进行分析。通过使用空间条纹分析方法和幅度归一化，可以有效地提高变形测量的准确性。证实了该方法能够以高分辨率功率分析具有凸相分布的变形过程。

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