Development of an ultraprecise piezoelectric deformable mirror for adaptive X-ray optics

著录项

• 来源
  《Emerging technology in precision engineering XIV》|2012年|50-53|共4页
• 会议地点 Hyogo(JP);Hyogo(JP)
• 作者

  Hiroki Nakamori; Satoshi Matsuyama; Shota lmai; Takashi Kimura; Yasuhisa Sano; Yoshiki Kohmura; Kenji Tamasaku; Makina Yabashi; Tetsuya Ishikawa; Kazuto Yamauchi;

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• 作者单位

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan,Japan Science and Technology Agency, CREST, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan;

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

  Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021, Japan;

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

  SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan;

  SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan;

  SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan;

  SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan;

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan,Japan Science and Technology Agency, CREST, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan,Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  deformable mirror; piezoelectric actuator; adaptive optics; X-ray mirror;

  机译：变形镜压电执行器自适应光学X射线镜;