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首页> 外文会议>EuSPEN(European Society for Precision Engineering and Nanotechnology) International Conference; 20040531-0602; Glasgow(GB) >Chemo-mechanical polishing with a deterministic variation of the removal function
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Chemo-mechanical polishing with a deterministic variation of the removal function

机译：化学机械抛光，去除功能有确定的变化

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摘要

The polishing technology is the final manufacturing step of producing ultra precision surfaces for optical applications. An increasing demand for integrated optics with high-end complex free-form surfaces for illustration as well as sophisticated illumination applications is extremely challenging to the close interaction of fine-tuned manufacturing processes in combination with innovative machine systems. Due to the design of an adaptive polishing module with five degrees of freedom at the Fraunhofer IPT the possibility is given to individually change the properties of the characteristic removal function of a locally applied polishing tool with means of superimposed kinematics. The freedom of applying independent movements to the polishing tool forms a unique base for detailed investigations on the chemo-mechanical polishing process. Utilizing the machine kinematics in a deterministic way, individually tailored removal functions are available for polishing optics with varying surface defects such as differently distinct waviness.
机译：抛光技术是生产用于光学应用的超精密表面的最后制造步骤。对于具有高端复杂自由形式表面的集成光学器件（用于说明）以及复杂的照明应用的需求不断增长，这对微调制造工艺与创新机器系统的紧密相互作用极具挑战性。由于在Fraunhofer IPT上设计了具有五个自由度的自适应抛光模块，因此可以通过叠加运动学来单独更改局部应用的抛光工具的特征消除功能的特性。对抛光工具进行独立运动的自由性为化学机械抛光工艺的详细研究奠定了独特的基础。以确定性的方式利用机器运动学，可以针对各种表面缺陷（例如不同的波纹度）的抛光光学器件使用个性化定制的去除功能。

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