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首页> 外文会议>EuSPEN(European Society for Precision Engineering and Nanotechnology) International Conference; 20040531-0602; Glasgow(GB) >Precision Position Control for a Self-moving Stage Utilizing Spring-mounted Piezoelectric Actuators
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Precision Position Control for a Self-moving Stage Utilizing Spring-mounted Piezoelectric Actuators

机译：利用弹簧式压电致动器的自动移动平台的精确位置控制

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摘要

This paper reports the positioning performance of a one degree-of-freedom (DOF) of self-moving stage consisting of internally installed spring-mounted piezoelectric actuators. The stage features two main characteristics: the impact force excided by the piezoelectric actuator can actuate the stage to move with precise step-motion, and the initially compressed spring can keep the continuously actuating action for the stage and thus with self-moving abiljty. A simple mechanical vibration system based on the configured setup was established to analyze the dynamic characteristics. Furthermore, for examining the characteristics of automatic positioning control, a PC-based closed-loop control system based on a heuristic model was configured and the experiments were carried out. The performance of automatic control system with the positioning accuracy being limited to the measuring system of 12 nm wassuccessfully obtained.
机译：本文报告了一个由内部安装的弹簧式压电致动器组成的一自由度（DOF）自移动平台的定位性能。该平台具有两个主要特征：压电致动器所施加的冲击力可以使平台以精确的步进运动致动，而初始压缩的弹簧可以保持平台的连续致动作用，从而具有自移动能力。建立了一个基于配置设置的简单机械振动系统来分析动态特性。此外，为了检查自动定位控制的特性，配置了基于PC的基于启发式模型的闭环控制系统，并进行了实验。成功获得了定位精度限于12 nm测量系统的自动控制系统的性能。

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