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首页> 外文会议>Ferroelectric Thin Films XII >Electrode effect on microwave properties of ferroelectric (Ba_xSr_(1-x))TiO_3 thin films
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Electrode effect on microwave properties of ferroelectric (Ba_xSr_(1-x))TiO_3 thin films

机译：电极对铁电（Ba_xSr_（1-x））TiO_3薄膜微波性能的影响

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摘要

Microwave properties of coplanar waveguide (CPW) transmission lines fabricated on high dielectric materials, such as ferroelectric Ba_(1-x)Sr_xTiO_3 films, are highly sensitive on the dimension and shape of electrodes. A small change in device dimension affects the total electrical length of the CPW, which may mislead the effective dielectric constant of the dielectric layer. Furthermore, extracting dielectric constant of high-k thin films from the measured microwave properties, such as S-parameters, is very difficult. The well known a modified conformal mapping method frequently exhibits an inconsistent dielectric constant for CPW on high-k materials. CPW transmission lines were fabricated on high-k thin films, ferroelectric Ba_(0.6)Sr_(0.4)TiO_3, which were deposited by the pulsed laser deposition with partial oxygen backgrounds. A large phase shift angle of 100° at 10 GHz was observed from the CPW (gap = 4 μm, length = 3 mm) with a 40 V of dc bias, which supports that the idea of the tunable microwave device application using ferroelectrics films. The dielectric constant of the thin ferroelectric film was extracted from the dimension of the CPW (gap, width, length) and the measured S-parameters by a modified conformal mapping. However, the dielectric constant of the ferroelectric thin film calculated by a modified conformal mapping exhibits a gap dependency; dielectric constant (990 ～ 830) decreases with increasing gap size (4 ～ 19 μm, respectively). For comparison, dielectric properties have been extracted by extensive EM-simulation using a HFSS~(TM) (Ansoft) with observed dimensions of CPW devices. Total phase, which is closely related with the dielectric constant of the film, is strongly affected by gap size, film thickness, and slanted angle of CPW.
机译：在高介电材料（例如铁电Ba_（1-x）Sr_xTiO_3膜）上制造的共面波导（CPW）传输线的微波特性对电极的尺寸和形状高度敏感。器件尺寸的微小变化会影响CPW的总电气长度，这可能会误导介电层的有效介电常数。此外，从测量的微波特性例如S参数中提取高k薄膜的介电常数非常困难。众所周知的改进的保形映射方法通常在高k材料上表现出CPW的介电常数不一致。 CPW传输线是在高k薄膜，铁电体Ba_（0.6）Sr_（0.4）TiO_3上制造的，该薄膜是通过脉冲激光沉积和部分氧本底沉积的。从CPW（间隙= 4μm，长度= 3 mm）观察到10 GHz时100°的大相移角，直流偏置为40 V，这支持使用铁电薄膜的可调谐微波器件应用的想法。通过修改的共形映射从CPW的尺寸（间隙，宽度，长度）和测得的S参数中提取铁电薄膜的介电常数。然而，通过修正的保形映射计算出的铁电薄膜的介电常数表现出间隙依赖性。介电常数（990〜830）随间隙尺寸的增加（分别为4〜19μm）而减小。为了进行比较，已经通过使用具有观察到的CPW器件尺寸的HFSS_TM（Ansoft）通过广泛的EM模拟来提取介电特性。总相位与薄膜的介电常数密切相关，其间隙尺寸，薄膜厚度和CPW的倾斜角度会强烈影响总相位。

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