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Calibration of areal surface topography measuring instruments

机译：平面表面形貌测量仪器的校准

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The ISO standards which are related to the calibration of areal surface topography measuring instruments are the ISO 25178-6xx series which defines the relevant metrological characteristics for the calibration of different measuring principles and the ISO 25178-7xx series which defines the actual calibration procedures. As the field of areal measurement is however not yet fully standardized, there are still open questions to be addressed which are subject to current research. Based on this, selected research results of the authors in this area are presented. This includes the design and fabrication of areal material measures. For this topic, two examples are presented with the direct laser writing of a stepless material measure for the calibration of the height axis which is based on the Abbott-Curve and the manufacturing of a Siemens star for the determination of the lateral resolution limit. Based on these results, as well a new definition for the resolution criterion, the small scale fidelity, which is still under discussion, is presented. Additionally, a software solution for automated calibration procedures is outlined.
机译：与面积表面形貌测量仪器的校准有关的ISO标准是ISO 25178-6xx系列和ISO 25178-7xx系列，ISO 25178-6xx系列定义了用于测量不同测量原理的相关计量特性，而ISO 25178-7xx系列则定义了实际的校准程序。然而，由于面积测量领域尚未完全标准化，因此仍有待解决的未解决问题，这些问题尚待当前研究。在此基础上，介绍了该领域作者的精选研究成果。这包括面积材料测量的设计和制造。对于此主题，给出了两个示例，它们是基于Abbott-Curve的激光无级测量直接测量高度轴的校准方法，以及制造西门子星型以确定横向分辨率极限的两个示例。基于这些结果，以及对分辨率标准的新定义，提出了仍在讨论中的小规模保真度。此外，概述了用于自动校准程序的软件解决方案。

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