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Calibration method for surface texture measuring instrument, calibration program for surface texture measuring instrument, recording medium storing the calibration program and surface texture measuring instrument
Calibration method for surface texture measuring instrument, calibration program for surface texture measuring instrument, recording medium storing the calibration program and surface texture measuring instrument
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机译：表面纹理测量仪的校准方法，表面纹理测量仪的校准程序，存储该校准程序的记录介质和表面纹理测量仪
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摘要
In a calibration method for a surface texture measuring instrument which measures a surface of a workpiece and includes an arm that is supported to be swingable around a base point thereof and is provided with a contact point at an end for scanning the workpiece surface, the calibration method includes a measurement step for measuring a calibration gauge of which cross section contains a part of a substantially perfect circle, an assignment step for assigning the detection results, which are obtained in the measurement step, in an evaluation formula based on a circle equation in which the center coordinates of the calibration gauge are (xc, zc) and the radius is “r”, and a calibration step for calibrating each parameter based on the evaluation formula obtained in the assignment step.
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机译：在用于表面纹理测量仪器的校准方法中，该表面纹理测量仪器测量工件的表面并且包括臂，该臂被支撑为可绕其基点摆动并且在其端部具有用于扫描工件表面的接触点。该方法包括：测量步骤，用于测量横截面包含基本完美的圆的一部分的标尺;分配步骤，用于将基于测量方程式获得的检测结果分配给基于圆方程的评估公式。校准规的中心坐标为（x c ，z c ）且半径为“ r”，并根据评估结果对每个参数进行校准在分配步骤中获得的公式。
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