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首页> 外文会议>International Conference and Exhibition on Laser Metrology, Machine Tool, CMM amp; Robotic Performance(LAMDAMAP 2005); 2005; >Self-calibration of a novel surface texture measuring instrument
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Self-calibration of a novel surface texture measuring instrument

机译：新型表面纹理测量仪的自校准

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摘要

This paper describes a model and algorithms for the self-calibration of a novel, traceable, surface-texture measuring instrument being developed at the National Physical Laboratory. The areal instrument, with a working volume of 10 mm x 10 mm x 0.1 mm, is to be used in the characterisation of surface texture transfer artefacts in three dimensions and has a target uncertainty of 10 nm x 10 nm x 1 nm. The probe operating along the z-axis is of an air-bearing stylus design that incorporates differential interferometry designed to limit the effect of undesired displacements of the metrology frame. Estimates of location in the xy-plane are provided using a stage whose motion is measured by a combination of interferometric transducers and auto-collimators targeted at two orthogonal mirrors on the stage. In order to eliminate systematic effects caused by imperfect motion and form error associated with the mirrors, redundancy in the measurements is used to provide a map of the mirror geometry. This paper discusses a general model for coordinate measuring systems that use interferometric and autocollimator measurements and illustrates the use of self-calibration techniques to minimise the effects of non-ideal behaviour.
机译：本文介绍了一种用于国家校准实验室正在开发的新型，可追溯的表面纹理测量仪器的自校准模型和算法。面积为10 mm x 10 mm x 0.1 mm的面仪器将用于表征三维表面纹理转移伪像，目标不确定度为10 nm x 10 nm x 1 nm。沿z轴操作的探头采用气浮式测针设计，结合了差分干涉测量法，旨在限制计量框架不希望有的位移的影响。使用一个载物台提供xy平面中位置的估计，该载物台的运动是通过将干涉式换能器和自动准直仪的组合瞄准在载物台上的两个正交镜来进行测量的。为了消除由运动不完善引起的系统影响以及与反射镜相关的形状误差，测量中的冗余度用于提供反射镜几何形状的图。本文讨论了使用干涉测量和自动准直仪测量的坐标测量系统的通用模型，并说明了使用自校准技术来最大程度地减少非理想行为的影响。

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