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Suspended Micro-Ring Resonator for Enhanced Biomolecule Detection Sensitivity

机译:悬浮微环谐振器,可增强生物分子检测的灵敏度

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Silicon micro-ring biosensors demonstrate great potential for high sensitivity and multiplexed lab-on-chip systems. In this work, we characterize the sensing performance of suspended TM-mode silicon micro-ring resonators, 5 μm in radius, and demonstrate an enhanced sensitivity to molecular binding on the ring after suspension. In the TM-mode, the overall field intensity exists primarily outside of the waveguide core, with high electric field intensities present near the top and bottom surfaces. In traditional micro-ring resonators, only the top surface of the ring is available for surface analyte attachment, while the electric field intensity near the bottom surface dissipates by leaking into the underlying silicon dioxide substrate. In our approach, we suspend the TM-micro ring resonators in order to increase the surface area for binding events and increase the light-matter interaction with analytes. The suspended rings demonstrate excellent mechanical stability to multiple rinsing, soaking and nitrogen drying steps during the sensing procedure. We show that the resonance shift achieved by the suspended micro-rings after attachment of small chemical molecules and DNA is at least twice that of micro-rings supported by the silicon dioxide substrate.
机译:硅微环生物传感器在高灵敏度和多芯片实验室系统中显示出巨大潜力。在这项工作中,我们表征了半径为5μm的悬挂TM模式硅微环谐振器的传感性能,并证明了悬挂后对环上分子结合的增强的敏感性。在TM模式下,整个场强主要存在于波导芯的外部,在顶面和底面附近存在高电场强度。在传统的微环谐振器中,只有环的顶面可用于表面分析物的附着,而底面附近的电场强度会通过泄漏到下面的二氧化硅基板中而消散。在我们的方法中,我们暂停了TM-micro环形谐振器,以增加结合事件的表面积并增加与分析物的光物质相互作用。悬浮环对传感过程中的多个漂洗,浸泡和氮气干燥步骤显示出极好的机械稳定性。我们表明,在附着小化学分子和DNA后,由悬浮的微环实现的共振位移至少是由二氧化硅衬底支撑的微环的共振位移的两倍。

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