A method for suspending micro-ring resonators in a silicon-on-insulator substrate was developed. Due to the low insertion loss of the suspension mechanism and high confinement of the resonant cavity, quality factors exceeding 15,000 of micron-size suspended rings were achieved. Often, applications of such resonant cavities require tunability of its resonant wavelength. In this work, we also present two methods of tuning the cavity, one by thermal stimulation and the other by MEMS electrostatic actuation.
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