In-Situ observation of the oxygen nucleation in silicon with X-Ray single crystal diffraction

机译：X射线单晶衍射法原位观察硅中氧的形核

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The measurement of Pendellosungs oscillations was used to observe the time dependent nucleation of oxygen in a Czochralski grown single crystal at 750℃. It is shown, that the theoretical approach of the statistical dynamical theory describes the data well. Within the framework of this theory it is possible to determine the static Debye-Waller-factor as a function of the annealing time by evaluating the mean value of the Bragg intensity and the period length. The temperature influence on the Pendellosungs distance was corrected for by measurement of a Float-zone sample at the same temperature.

机译：彭氏振子的测量用于观察切克劳斯基生长的单晶在750℃下氧的时间依赖性成核。结果表明，统计动力学理论的理论方法很好地描述了数据。在此理论的框架内，可以通过评估布拉格强度和周期长度的平均值来确定静态Debye-Waller因子作为退火时间的函数。通过在相同温度下测量浮区样品，校正了温度对翼龙距离的影响。

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来源
《Gettering and defect engineering in semiconductor technology XIV》|2011年|p.353-359|共7页
会议地点 Loipersdorf(AT);Loipersdorf(AT)
作者
Johannes Will; Alexander Groeschel; Christoph Bergmann; Andreas Magerl;
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作者单位

Crystallography and Structural Physics, University of Erlangen-Nuernberg, Staudtstr. 3, 91058 Erlangen, Germany;

Crystallography and Structural Physics, University of Erlangen-Nuernberg, Staudtstr. 3, 91058 Erlangen, Germany;

Crystallography and Structural Physics, University of Erlangen-Nuernberg, Staudtstr. 3, 91058 Erlangen, Germany;

Crystallography and Structural Physics, University of Erlangen-Nuernberg, Staudtstr. 3, 91058 Erlangen, Germany;

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原文格式 PDF
正文语种 eng
中图分类半导体技术;
关键词
silicon; static debye-waller factor; statistical dynamical theory; single crystal diffraction; oxygen nucleation; in-situ; X-ray; wedge shaped geometry; annealing;

机译：硅;静态德拜沃勒因子；统计动力学理论；单晶衍射氧成核原位X射线楔形几何；退火;

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专利

1. In-situ observation of the oxygen nucleation in silicon with X-ray single crystal diffraction [J] . Will J., Gr?schel A., Bergmann C., Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2011,第Null期

机译：X射线单晶衍射法原位观察硅中氧的形核
2. Radial oxygen precipitation of a 12" CZ silicon crystal studied in-situ with high energy X-ray diffraction [J] . Christoph Bergmann, Johannes Will, Alexander Groeschel, Physica status solidi . 2014,第11期

机译：高能X射线衍射原位研究12“ CZ硅晶体的径向氧沉淀
3. In-situ Observation of Zinc Electrodeposition on Iron Single Crystal Using Synchrotron Radiation X-ray Diffraction [J] . Masao KUROSAKI, Muneyuki IMAFUKU, Koichi KAWASAKI 鉄と鋼／Journal of the Iron and Steel Institute of Japan. . 2003,第1期

机译：同步辐射X射线衍射在铁单晶上电沉积锌的原位观察
4. In-Situ observation of the oxygen nucleation in silicon with X-Ray single crystal diffraction [C] . Johannes Will, Alexander Groschel, Christoph Bergmann, International Biannual Meeting on Gettering and Defect Engineering in Semiconductor . 2011

机译：用X射线单晶衍射在硅中氧气的原位观察
5. Coherent x-ray diffractive imaging and nucleation of protein crystals. [D] . Boutet, Sebastien. 2005

机译：相干X射线衍射成像和蛋白质晶体成核。
6. In-situ X-ray diffraction snapshotting: Determination of the kinetics of a photodimerization within a single crystal [O] . Fei-Long Hu, Shu-Long Wang, Jian-Ping Lang, -1

机译：原位X射线衍射快照：单晶内光二聚化动力学的测定
7. In-situ Observation of Zinc Electrodeposition on Iron Single Crystal Using Synchrotron Radiation X-ray Diffraction [O] . Masao KUROSAKI, Muneyuki IMAFUKU, Koichi KAWASAKI 2003

机译：使用Synchrotron辐射X射线衍射，原位原位观察铁单晶锌电沉积

In-Situ observation of the oxygen nucleation in silicon with X-Ray single crystal diffraction

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