首页> 外文会议>Gettering and defect engineering in semiconductor technology XVI >Determination of activation energy of the iron acceptor pair association and dissociation reaction
【24h】

Determination of activation energy of the iron acceptor pair association and dissociation reaction

机译:铁受体对缔合和解离反应活化能的测定

获取原文
获取原文并翻译 | 示例

摘要

A method to measure the reaction rates of the iron acceptor pair association and dissociation is presented and applied. The activation energies of the dissociation and association reaction are determined for the acceptors boron, aluminum, gallium and indium. Additionally, the activation energies are reported for different illumination intensities. It is found that the activation energy of the association reaction varies for the investigated acceptors and that the activation energy of the dissociation reaction depends strongly on the illumination intensity. It is shown that neglecting of the dissociation reaction in the evaluation of relative interstitial iron content decrease causes a considerable overestimation of the activation energy of the iron acceptor association.
机译:提出并应用了一种测量铁受体对缔合和解离反应速率的方法。确定了受体硼,铝,镓和铟的解离和缔合反应的活化能。另外,报告了不同照明强度的活化能。已经发现,对于所研究的受体,缔合反应的活化能变化,并且离解反应的活化能强烈依赖于照射强度。结果表明,在评估间隙铁含量的降低中忽略了离解反应会导致对铁受体缔合活化能的高估。

著录项

  • 来源
  • 会议地点 Bad Staffelstein(DE)
  • 作者单位

    CiS Forschungsinstitut fuer Mikrosensorik GmbH, Konrad-Zuse-Str. 14, 99099 Erfurt, Germany;

    CiS Forschungsinstitut fuer Mikrosensorik GmbH, Konrad-Zuse-Str. 14, 99099 Erfurt, Germany,TU llmenau, Institut fuer Physik, Weimarer Str. 32, 98693 llmenau, Germany;

    CiS Forschungsinstitut fuer Mikrosensorik GmbH, Konrad-Zuse-Str. 14, 99099 Erfurt, Germany,Technische Hochschule Mittelhessen, Wiesenstraße 14, 35390 Gießen, Germany;

    CiS Forschungsinstitut fuer Mikrosensorik GmbH, Konrad-Zuse-Str. 14, 99099 Erfurt, Germany,TU llmenau, Institut fuer Physik, Weimarer Str. 32, 98693 llmenau, Germany;

    TU llmenau, Institut fuer Physik, Weimarer Str. 32, 98693 llmenau, Germany;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    silicon; iron-acceptor pairs;

    机译:硅;铁受体对;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号