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Microchannel-cooled heatsinks for high-average-power laser diode arrays

机译:用于高平均功率激光二极管阵列的微通道冷却散热器

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Abstract: Detailed performance results for an efficient and low thermal impedance laser diode array heatsink are presented. High duty factor and even cw operation of fully filled laser diode arrays at high stacking densities are enabled at high average power. Low thermal impedance is achieved using a liquid coolant and laminar flow through microchannels. The microchannels are fabricated in silicon using an anisotropic chemical etching process. A modular rack-and-stack architecture is adopted for heatsink design, allowing arbitrarily large 2-D arrays to be fabricated and easily maintained. The excellent thermal control of the microchannel heatsinks is ideally suited to pump array requirements for high average power crystalline lasers because of the stringent temperature demands that are required to efficiently couple diode light to several-nanometer-wide absorption features characteristic of lasing ions in crystals. !11
机译:摘要:给出了高效,低热阻的激光二极管阵列散热器的详细性能结果。在高平均功率下,可以以高堆叠密度实现完全填充的激光二极管阵列的高占空比甚至cw操作。使用液体冷却剂和流经微通道的层流可实现低热阻。使用各向异性化学蚀刻工艺在硅中制造微通道。散热器设计采用模块化的机架和堆栈架构,从而可以制造任意大尺寸的二维阵列并易于维护。微通道散热器的出色热控制性能非常适合高平均功率晶体激光器的泵浦阵列要求,因为严格的温度要求才能有效地将二极管光耦合到晶体中激光离子的几纳米宽吸收特性。 !11

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