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首页> 外文会议>High-Power Laser Ablation VI pt.1 >Dynamics of particle ejection in dry laser cleaning
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Dynamics of particle ejection in dry laser cleaning

机译：激光干法清洗中颗粒喷射的动力学

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Time- and space-resolved forward scattering detection was demonstrated as a suitable technique to characterize the dynamics of the ejected particles during dry laser cleaning. Silica particles with radii of 250 nanometers deposited on silicon substrates were irradiated by single nanosecond laser pulses with fluences above the particle removal threshold. The observation of different particle clouds propagating with different velocities was in support of the coexistence of at least two removal mechanisms. The ejection velocities were measured as a function of laser fluence in order to distinguish between the mechanisms involved in laser-assisted particle removal.
机译：时间和空间分辨的前向散射检测被证明是表征干激光清洁过程中喷射颗粒动力学的一种合适技术。半径为250纳米的二氧化硅颗粒沉积在硅基板上，并通过单个纳秒激光脉冲辐照，其注量高于颗粒去除阈值。观察到以不同速度传播的不同粒子云支持了至少两种清除机制的共存。测量喷射速度与激光能量密度的函数关系，以区分参与激光辅助颗粒去除的机制。

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