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The Study on MEMS-based micro pump technology

机译：基于MEMS的微泵技术研究

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The micropump, an important operational device of MEMS, plays a very important role in micro systems. As the micropump becomes smaller and smaller, the fabrication of the moving parts becomes more and more difficult. Therefore, many micropumps based on new principles have been developed. They are divided into two types, pumps with mechanical components and ones without them. To date, most of these micropumps are membrane-driven. The research on the micropump in the past decade is reviewed. The current status of micropump research, the structural designs and principle of operation of microfluidic controlling systems are presented in this paper. Some unresolved problems are discussed. Finally, new ideas are put forward.
机译：微型泵是MEMS的重要运算装置，在微型系统中起着非常重要的作用。随着微型泵变得越来越小，运动部件的制造变得越来越困难。因此，已经开发了许多基于新原理的微型泵。它们分为两种类型，带机械部件的泵和不带机械部件的泵。迄今为止，大多数微型泵都是由膜驱动的。回顾了过去十年中有关微型泵的研究。介绍了微泵研究的现状，微流控系统的结构设计和工作原理。讨论了一些未解决的问题。最后，提出了新的想法。

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