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Manufacturing and Testing SiC Aspherical mirrors in Space telescopes

机译：在太空望远镜中制造和测试SiC非球面镜

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Reaction Bonded (RB) SiC mirrors due to their excellent specific stiffness and thermal properties have been widely used in space telescopes. However, polishing large SiC aspherical mirrors is difficult compared to other materials such as fused silica or Zerodu. In addition, surface roughness of the polished SiC mirrors is limited by the defects of the materials and needs to be improved by means of surface coating technique. This paper introduces the current progress of large SiC aspherical mirrors manufacturing and testing in CIOMP. In particular, the procedures of making large off-axis aspherical mirrors were discussed in detail. A proprietary computer controlled optical surfacing (CCOS) technique was utilized to grind and polish the mirrors and the computer aided null test was used to measure the surface figure. As results, a 600mm class off-axis SiC aspherical mirrors was demonstrated with figure error less than 13nm rms.
机译：反应粘合（RB）SiC反射镜由于其出色的比刚度和热性能而被广泛用于太空望远镜。但是，与其他材料（例如熔融石英或Zerodu）相比，抛光大型SiC非球面镜是困难的。另外，抛光的SiC反射镜的表面粗糙度受到材料缺陷的限制，需要通过表面涂覆技术来改善。本文介绍了CIOMP中大型SiC非球面镜的制造和测试的最新进展。特别是，详细讨论了制作大型离轴非球面镜的过程。利用专有的计算机控制的光学表面处理（CCOS）技术对镜面进行打磨和抛光，并使用计算机辅助零测试来测量表面图形。结果，证明了600mm级离轴SiC非球面镜的图形误差小于13nm rms。

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