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首页> 外文会议>ICO20: Optical Devices and Instruments >Nanometer measurement of the planar motion of a magnetic levitation stage based on optical heterodyne interferometry
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Nanometer measurement of the planar motion of a magnetic levitation stage based on optical heterodyne interferometry

机译：基于光学外差干涉法的磁悬浮载物台平面运动的纳米测量

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摘要

Nanoscale micrornotion stage is a key instrument for the reasarch of nanotechnology that provides one-dimensional, two-dimensional, or three-dimensional nanoscale movement. In this paper, a magnetic levitation stage that can provide large range micrornotion with nanometer positioning accuracy is proposed, and a height measurement and calibration of the stage using a triplex heterodyne interferometer is presented. This measurement system is mainly consists of three parts: two-frequency He-Ne laser, three heterodyne interferometers and three phase meters, respectively. Each heterodyne interferometer is used to measure the displacement of the magnetic levitation stage in the vertical direction. Then, the triplex heterodyne interferometer can realize the nanometer measurement of three degrees of freedom motion for the stage, that is, translation in the z-axis and rotations around the x- and y-axes. Furthermore, the three heterodyne interferometers have a common planar reflecting mirror, thus, the advantage of this measurement method is that the heterodyne interference can always produce within the travel range wherever the stage travels, this ensure the stage can always have the same height as that of desired position, and this measurement can give fine height consistency.
机译：纳米级微位移阶段是提供一维，二维或三维纳米运动的纳米技术研究的关键工具。本文提出了一种磁悬浮载物台，该载物台可以提供大范围的微核，具有纳米定位精度，并提出了利用三重外差干涉仪对载物台进行高度测量和校准的方法。该测量系统主要由三部分组成：两频He-Ne激光器，三个外差干涉仪和三个相位仪。每个外差干涉仪都用于测量磁悬浮台在垂直方向上的位移。然后，三重外差干涉仪可以实现载物台三个自由度运动的纳米测量，即在z轴上的平移以及在x轴和y轴周围的旋转。此外，三个外差干涉仪具有一个共同的平面反射镜，因此，此测量方法的优点在于，无论平台移动到哪里，外差干扰始终会在其移动范围内产生，从而确保平台始终具有与平台相同的高度。理想位置的位置，并且此测量可以提供良好的高度一致性。

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