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首页> 外文会议>ICO20: Optical Devices and Instruments >Developing of In-suit Long Trance Profiler for Testing Slope error of Aspherical Optical elements
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Developing of In-suit Long Trance Profiler for Testing Slope error of Aspherical Optical elements

机译：用于测试非球面光学元件的倾斜误差的内置式长Tra轮廓仪的开发

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摘要

Profile error of super smooth surface of optical elements at X-ray/EUV in synchrotron radiation (SR) light beam line is described as slope error of them generally. The Long Trace Profiler (LPT) is used for testing surface slope error of SR optical elements in world generally. It is requisite to use In-suit LTP measuring surface thermal distortion of SR optical elements with high heat under high bright SR source. Authors design an In-suit LTP by means of co-path interferometer with pencil light beam. The instrument not only can be used for testing slope error of mirrors in Lab. also in situation test the distortion of mirror with high heat load at synchrotron light beam line. The device can be used to test various absolute surface figures of optical elements such as aspherieal, spherical and plane. It is needless standard reference surface. It is named by LTP-III. This paper describes its basic operating principle, optical system, mechanical constructions, DC serve motor control system, array detector, data acquisition system and computer system for controlling and data analysis of LTP-III. The Instrument has advantages of high accuracy, low cost, multifunction and wide application. Length of surface measured of optical element accuracy is 0.04 arcsec.
机译：光学元件在同步辐射（SR）光束中在X射线/ EUV处的超光滑表面的轮廓误差通常描述为它们的斜率误差。全球普遍使用长轨迹轮廓仪（LPT）测试SR光学元件的表面倾斜误差。必须在高亮度SR源下使用In-suit LTP测量具有高热量的SR光学元件的表面热变形。作者通过带笔形光束的同路干涉仪设计了一套In-suit LTP。该仪器不仅可以在实验室中用于测试反射镜的倾斜度误差。还应在情况下测试同步加速器光束线上具有高热负荷的反射镜的变形。该设备可用于测试光学元件的各种绝对表面图形，例如球形，球形和平面形。它是不必要的标准参考面。它由LTP-III命名。本文介绍了LTP-III的基本工作原理，光学系统，机械结构，直流伺服电动机控制系统，阵列检测器，数据采集系统以及用于控制和数据分析的计算机系统。该仪器具有精度高，成本低，功能多样，适用范围广的优点。光学元件精度测得的表面长度为0.04 arcsec。

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