Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage

机译：平面运动平台的多自由度表面编码器的串扰误差分析

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摘要

In this paper, the analysis of crosstalk error in an optical sensor head for a six degree-of-freedom (DOF) surface encoder is carried out. Since the crosstalk errors among the outputs from the sensor degrade the measurement uncertainty of the surface encoder, a further detailed analysis is required. In this paper, an intensive investigation on the crosstalk errors is carried out throughout some experiments.

机译：本文对六自由度（DOF）表面编码器的光学传感器头中的串扰误差进行了分析。由于传感器输出之间的串扰误差会降低表面编码器的测量不确定度，因此需要进行更详细的分析。在本文中，贯穿整个实验对串扰误差进行了深入研究。

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来源
《IEEE International Conference on Advanced Manufacturing》|2018年|36-39|共4页
会议地点 Yunlin(CN)
作者
Ryo Ishizuka; Hiraku Matsukuma; Yuki Shimizu; Wei Gao;
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Precision Nanometorogy Laboratory Department of Finemechanics Tohoku University Sendai Miyagi 980-8579 Japan;

Precision Nanometorogy La;

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Gratings; Crosstalk; Measurement by laser beam; Laser beams; Optical sensors; Semiconductor device measurement;

机译：光栅；相声;激光束测量；激光束光学传感器半导体器件测量;

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专利

1. Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage [J] . Yuki Shimizu, Masaya Furuta, Yuan-Liu Chen, Procedia CIRP . 2018,第5aPartaA期

机译：用于平面运动阶段的六维自由度表面编码器的不确定性分析
2. Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage [J] . Wei Gao, Yoshikazu Arai, Atsushi Shibuya, Precision Engineering . 2006,第1期

机译：精密线性空气轴承台的多自由度误差运动的测量
3. A surface motor-driven planar motion stage integrated with an XYθ_(Z) surface encoder for precision positioning [J] . Wei Gao, Shuichi Dejima, Hiroaki Yanai, Precision Engineering . 2004,第3期

机译：集成了XYθ_（Z）表面编码器的表面电机驱动的平面运动平台，用于精确定位
4. Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage [C] . Ryo Ishizuka, Hiraku Matsukuma, Yuki Shimizu, IEEE International Conference on Advanced Manufacturing . 2018

机译：平面运动阶段多程度自由度表面编码器的串扰误差分析
5. Calibration and error definition for rotary motion instrumentation using an incremental motion encoder (IME). [D] . Hatiris, Emmanouil. 2001

机译：使用增量运动编码器（IME）的旋转运动仪表的校准和误差定义。
6. Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages [O] . Yindi Cai, Qi Sang, Zhi-Feng Lou, 2019

机译：同时测量线性位移台五自由度误差运动的激光测量系统的误差分析和补偿
7. Design and analysis of a low crosstalk error nested structure two-dimensional micro-displacement stage [O] . Tao Jin, Siwei Luo, Yanfen Le, 2021

机译：低串扰误差嵌套结构二维微位移阶段的设计与分析
8. Random Vibration Analysis of Inelastic Multi-Degree-of-Freedom Systems Subjected to Earthquake Ground Motions. [R] . gazetas,george 1976

机译：非弹性多自由度系统在地震作用下的随机振动分析。

Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage

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