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FIVE DOF MOTION ERROR MEASURING DEVICE HAVING A MOTION ERROR MEASURING FUNCTION OF A TRANSFERRING DEVICE, MEASURING PITCHING YAWING ROLLING ERRORS, AND HORIZONTAL ERRORS OF A STAGE LINEARLY MOVING BY USING A PSD(POSITION SENSITIVE DETECTOR) ON A REAL TIME BASIS
FIVE DOF MOTION ERROR MEASURING DEVICE HAVING A MOTION ERROR MEASURING FUNCTION OF A TRANSFERRING DEVICE, MEASURING PITCHING YAWING ROLLING ERRORS, AND HORIZONTAL ERRORS OF A STAGE LINEARLY MOVING BY USING A PSD(POSITION SENSITIVE DETECTOR) ON A REAL TIME BASIS
PURPOSE: A five DOF motion error measuring device having a motion error measuring function of a transferring device is provided to simplify an installation and manipulation of a motion error measuring device and to constitute the device with affordable costs.;CONSTITUTION: A five DOF motion error measuring device having a motion error measuring function of a transferring device comprises a light emitting member(10), a diffraction grating(20), a first optical splitter(31), a first optical loop(40), and a second optical loop(50). The light emitting member outputs laser beams of a predetermined wavelength. The diffraction grating is attached on a side of a linear stage, thereby reflecting the laser beams and diffracts. The first optical splitter measures a yawing error, a pitching error, a rolling error, and a horizontal error of the linear stage by using zero order lights(L0), + first order lights(L1), - first order lights(L2) collected by being diffracted by the diffraction grating. The second optical loop measures a transferring distance of the linear stage by using lights received by have passed through the first optical loop.;COPYRIGHT KIPO 2012
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