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首页> 外文会议>IEEE International Conference on Mechatronics and Automation; 20060625-28; Luouang(CN) >Fabrication of A Micro Elliptical Collimator Lens for A Beam Shape Form of Laser Diode
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Fabrication of A Micro Elliptical Collimator Lens for A Beam Shape Form of Laser Diode

机译：用于激光二极管光束形状的微椭圆准直透镜的制作

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This paper describes a new fabrication process of a micro elliptical collimator lens to form a beam shape for LD(Laser Diode), and the evaluation results of the optical characteristic for this lens. Beam shape of LD is an ellipse because divergent light angle is different between horizontal and vertical direction, which increases a coupling loss with an optical fiber. In this presentation, we propose the lens to form the divergent light of an elliptical beam shape to the collimated light of a circular beam shape. This lens makes it possible to reduce the coupling loss with the optical fiber. For this purpose, we designed one lens, which has different curvature radiuses between incident and output surfaces. In the incident surface, the divergent light is formed to the convergent light, and in the output surface, the convergent light is formed to the collimated light. We simulated the optical characteristic of this lens, and designed for various parameters. In order to fabricate this lens, we propose a new process using a chemically absorbed monomolecular layer, which has an excellent hydrophobic property. This layer is patterned and deposited by a photolithographic technique. Next, we drop a UV(Ultra Violet) cure material on the hydrophilic area, as the result, we can fabricate a micro elliptical lens shape. The curvature radius of this lens can be controlled by the amount of a dropped UV cure material and an elliptical pattern size in horizontal and vertical direction. The formed lens shapes are transferred by the electro-plating and then the micro dies are fabricated. And they are used for molding the plastic lens.
机译：本文介绍了一种新的制造微椭圆准直透镜的工艺，以形成用于激光二极管的光束形状，并评估了该透镜的光学特性。 LD的光束形状为椭圆形，因为水平和垂直方向上的发散光角不同，这增加了与光纤的耦合损耗。在此演示文稿中，我们建议使用透镜将椭圆光束形状的发散光形成为圆形光束形状的准直光。该透镜可以减少与光纤的耦合损耗。为此，我们设计了一个在入射和出射表面之间具有不同曲率半径的透镜。在入射表面中，发散光形成为会聚光，在输出表面中，会聚光形成为准直光。我们模拟了该镜片的光学特性，并针对各种参数进行了设计。为了制造这种镜片，我们提出了一种使用化学吸收的单分子层的新工艺，该工艺具有出色的疏水性。该层通过光刻技术被图案化和沉积。接下来，我们将UV（Ultra Violet）固化材料滴在亲水区域上，结果可以制造出微椭圆透镜形状。该透镜的曲率半径可以通过滴下的UV固化材料的量和水平和垂直方向上的椭圆图案尺寸来控制。通过电镀转移形成的透镜形状，然后制造微模具。它们用于模制塑料透镜。

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