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首页> 外文会议>IMAPS 40th international symposium on microelectronics >New Innovations in MEMS Fabrications are Responsible for Meeting the Demand for Low-Cost Inertial Sensors for Consumer Market
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New Innovations in MEMS Fabrications are Responsible for Meeting the Demand for Low-Cost Inertial Sensors for Consumer Market

机译：MEMS制造领域的新创新负责满足消费市场对低成本惯性传感器的需求

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摘要

The rapid growth in consumer electronics has created a need for adding real intelligence that can bring improved performance and intuitive user interface. Inertial sensors are in the forefront of this trend,as can be seen in some of the latest consumer electronic products introduction,such as,image stabilization for improved picture quality in digital still cameras,motion controlled games in Wii and PlayStation,point and click in air mice and 3D remote controllers,gesture recognition and user interface functions in smart-phones,and dead-reckoning functions in the portable navigation devices. Gyroscopes and accelerometers are the essential enabling technologies in all of these advance motion sensing features. The need for lower cost,more reliable,and smaller size MEMS inertial sensors is here already. This paper addresses some of the key challenges with meeting these market demands and how one company’s novel approach in MEMS fabrication,called Nasiri-Fabrication,is promising to fill these market needs. The key benefits of Nasiri-fabrication is examined and compared to other more traditional MEMS fabrication solutions used today. Nasiri-fabrication is already credited for bringing to the market,in the record time of less than three years,a new generation of integrated dual-axis gyroscopes to consumer electronics market that offer an order of magnitude reduction in cost and size compared to its closest MEMS counterparts.
机译：消费类电子产品的快速增长引起了对增加真实智能的需求，这些智能可以带来更高的性能和直观的用户界面。在一些最新的消费电子产品介绍中可以看到，惯性传感器处于这一趋势的最前沿，例如，用于提高数码相机的图像质量的图像稳定，Wii和PlayStation中的运动控制游戏，指向并单击空中鼠标和3D遥控器，智能手机中的手势识别和用户界面功能以及便携式导航设备中的死锁功能。陀螺仪和加速度计是所有这些高级运动感测功能中必不可少的使能技术。低成本，更可靠和更小尺寸的MEMS惯性传感器已经在这里。本文解决了满足这些市场需求所面临的一些关键挑战，以及一家公司名为nasiri-fabrication的MEMS制造新方法如何有望满足这些市场需求。研究了Nasiri制造的主要优势，并将其与当今使用的其他更传统的MEMS制造解决方案进行了比较。在不到三年的创纪录时间内，Nasiri制造已被推向市场，这是面向消费电子市场的新一代集成双轴陀螺仪，与最接近的产品相比，其成本和尺寸降低了一个数量级。 MEMS同行。

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