• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Infrared Technology and Applications XXXIII pt.2; Proceedings of SPIE-The International Society for Optical Engineering; vol.6542 pt.2 >Motheye Structured Surface Fabrication as Durable Anti-Reflection Treatment on CdZnTe for Space based LWIR Detector Devices
【24h】

Motheye Structured Surface Fabrication as Durable Anti-Reflection Treatment on CdZnTe for Space based LWIR Detector Devices

机译：用于基于空间的LWIR检测器设备的CdZnTe上持久耐用的抗反射处理的Motheye结构化表面加工

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Space based HgCdTe imaging devices, built on CdZnTe substrates, require radiation hardened anti-reflection (AR) treatments in order to withstand the rigors of the space environment. Conventional anti-reflection (AR) coatings provide adequate optical performance but are prone to delamination and degradation due to extreme temperature cycling and irradiation in space. Consequently, there is an intense need for improved AR technology that combines high optical performance with improved durability. Etching physical gradient or motheye structures directly into the CdZnTe eliminates the need to deposit additional layers of different materials onto the substrate, avoiding the possibility of delamination and cross contamination. Motheye AR surfaces, under development at Surmet Corporation, have demonstrated excellent broadband optical performance in the LWIR (7 tol4 micron) waveband. Surmet's motheye technology involves direct etching of a regular pattern of fine features into the CdZnTe substrate, using standard lithography and dry etching techniques. The results from this ongoing research and development effort are discussed.
机译：基于CdZnTe基板的基于空间的HgCdTe成像设备需要进行辐射硬化的抗反射（AR）处理，以承受太空环境的严峻考验。常规的抗反射（AR）涂层可提供足够的光学性能，但由于极端温度循环和空间照射而易于分层和降解。因此，迫切需要将高光学性能与耐用性相结合的改进的AR技术。将物理梯度或分子结构直接蚀刻到CdZnTe中，无需在基板上沉积不同材料的其他层，从而避免了分层和交叉污染的可能性。 Surmet Corporation正在开发的Motheye AR表面在LWIR（7至14微米）波段显示出出色的宽带光学性能。 Surmet的Motheye技术涉及使用标准光刻和干法蚀刻技术将规则的精细特征图案直接蚀刻到CdZnTe基板中。讨论了正在进行的研发工作的结果。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号