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首页> 外文会议>Infrared Technology and Applications XXXIII pt.2; Proceedings of SPIE-The International Society for Optical Engineering; vol.6542 pt.2 >The geometric design of microbolometer elements for uncooled focal plane arrays
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The geometric design of microbolometer elements for uncooled focal plane arrays

机译：非冷却焦平面阵列微测辐射热元件的几何设计

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In this paper we discuss methods to improve the geometric design of microbolometer pixels in uncooled focal plane arrays. For cost reduction reasons, the pixel pitch of these microbolometer elements should be reduced as much as possible while keeping the same level of performance. This becomes increasingly difficult once the dimensions of the microbolometer elements reach a critical value of about 25 micrometers, mainly because the available space limits the thermal isolation and the available area for IR absorption. For these reasons it is essential to optimize not only the material properties but also the geometric aspects of the microbolometer structure to get the maximum performance for a given size of the elements. Extending the work of Liddiard, in the first part of this paper we discuss the design of the optical cavity, focussing mainly on the influence of the sacrificial layer thickness, which defines the properties of the resulting Fabry Perot resonator. In the second part of this paper we concentrate on the geometry of the absorbing membrane itself and give estimates for optimum film thickness and lateral dimensions.
机译：在本文中，我们讨论了改进未冷却焦平面阵列中微测辐射热像素的几何设计的方法。出于降低成本的原因，这些微辐射热测量元件的像素间距应尽可能降低，同时保持相同的性能水平。一旦测微辐射热计元件的尺寸达到约25微米的临界值，这将变得越来越困难，这主要是因为可用空间限制了热隔离和IR吸收的可用面积。由于这些原因，至关重要的是，不仅要优化微辐射热测量仪结构的材料性能，还要优化其几何形状，以在给定尺寸的元件下获得最佳性能。扩展Liddiard的工作，在本文的第一部分中，我们讨论光学腔的设计，主要集中在牺牲层厚度的影响上，牺牲层厚度的影响定义了最终的Fabry Perot谐振器的特性。在本文的第二部分中，我们重点介绍吸收膜本身的几何形状，并给出最佳膜厚度和横向尺寸的估算值。

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