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首页> 外文会议>Inorganic thin films and coatings >Investigation of Boron Nitride Prepared by Low Pressure Chemical Vapor Deposition at 650～1200 ℃
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Investigation of Boron Nitride Prepared by Low Pressure Chemical Vapor Deposition at 650～1200 ℃

机译：650〜1200℃低压化学气相沉积制备氮化硼的研究

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摘要

BN coatings were deposited on carbon substrates by low-pressure chemical vapor depositionin a large temperature range of 650～1200 ℃, employing BCl_3-NH_3-H_2 reaction system. The effects of depositing temperature on the yield, control step of deposition progress (deposition mechanism), microstructure, and crystallization degree of BN coating were investigated. Results show that BN deposition rate first increases and then decreases as the rising temperature and the maximum deposition rate occurs at 900～1000 ℃. By the determination of the Arrenius relationship, there are three temperature regions with different active energies and controlled by different deposition mechanisms, i.e. chemical reaction, mass transport and depletion of reactants. Through the surface morphology observation by scanning electron microscopy, chemical composition analyses by energy dispersion spectroscopy and crystallization degree and grain size comparison by Raman spectroscopy, it can be drawn that interphase-used BN is suitable to be deposited at 1000 ℃.
机译：采用BCl_3-NH_3-H_2反应体系，在650〜1200℃的大温度范围内，通过低压化学气相沉积将BN涂层沉积在碳基底上。研究了沉积温度对BN涂层产量，沉积过程控制步骤（沉积机理），微观结构和结晶度的影响。结果表明，随着温度的升高，BN的沉积速率先升高后降低，最大沉积速率出现在900〜1000℃。通过确定阿雷纽斯关系，存在三个温度区域，它们具有不同的有功能量，并由不同的沉积机理，即化学反应，传质和反应物耗竭控制。通过扫描电子显微镜的表面形貌观察，能量色散光谱法的化学成分分析，拉曼光谱法的结晶度和晶粒尺寸比较，可以得出相间使用的BN适合在1000℃下沉积。

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  • 来源
  • 会议地点 Guilin(CN)
  • 作者

    Fang Ye; Litong Zhang; Yongsheng Liu; Meng Su; Laifei Cheng; Xiaowei Yin;

  • 作者单位

    Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;

    Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;

    Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;

    Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;

    Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;

    Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi'an, Shaanxi 710072, P. R. China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Boron nitride; Chemical vapor deposition; Deposition mechanism; Thermodynamics; Kinetics;

    机译：氮化硼；化学气相沉积;沉积机制；热力学；运动学;

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