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首页> 外文会议>Institute of Physics Electron Microscopy and Analysis Group Conference, Sep 5-7, 2001, Dundee >A new method for the determination of the coefficients of the wave aberration function
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A new method for the determination of the coefficients of the wave aberration function

机译：确定波像差函数系数的新方法

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摘要

A new method for the accurate determination of both the symmetric and asymmetric coefficients of the wave aberration function has been developed. The relative defoci and displacements of images in a focal series can be determined from an analysis of the Phase Correlation Function (PCF) between pairs of images with an appropriate phase compensation. Subsequently, the absolute coefficients of both defocus and 2-fold astigmatism are determined with a Phase Contrast Index function. Extension of these methods to a series of tilted illumination images allows the asymmetric coefficients to be determined using numerical or analytical fitting of the apparent defocus and astigmatism present under tilted illumination conditions. Overall this method allows a very accurate automated aberration determination even for largely crystalline samples with little amorphous contamination.
机译：已经开发出一种新的方法，可以精确确定波像差函数的对称系数和非对称系数。可以通过对具有适当相位补偿的图像对之间的相位相关函数（PCF）的分析来确定焦点序列中图像的相对偏移和位移。随后，利用相衬指数函数确定散焦和2倍散光的绝对系数。将这些方法扩展到一系列倾斜照明图像，可以使用在倾斜照明条件下出现的表观散焦和像散的数值或分析拟合来确定不对称系数。总体而言，即使对于晶体含量极高且几乎没有非晶污染的样品，该方法也可以实现非常准确的自动像差测定。

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