Imaging properties of various gases in the environmental SEM

机译：环境SEM中各种气体的成像特性

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Interactions of high energy (primary and backscattered) and low energy (secondary) electrons with gas molecules are considered with regard to the imaging processes in low vacuum and environmental scanning electron microscopes. Effects discussed include scattering of the primary beam into a focussed probe surrounded by a skirt, cascade amplification of secondary electrons signals as well as background, and effects of ions impacting on specimen surfaces. Guidelines are given for predicting the behaviour of gases when designing experiments.

机译：关于低真空和环境扫描电子显微镜中的成像过程，考虑了高能（一次和反向散射）和低能（二次）电子与气体分子的相互作用。讨论的影响包括将主光束散射到被裙部围绕的聚焦探针中，次级电子信号以及背景的级联放大，以及离子撞击样品表面的影响。给出了在设计实验时预测气体行为的指南。

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来源
《Institute of Physics Electron Microscopy and Analysis Group Conference, Sep 5-7, 2001, Dundee》|2001年|p.63-68|共6页
会议地点 Dundee(GB);Dundee(GB)
作者
B Thiel;
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作者单位

Polymers Colloids Group, Cavendish Laboratory, University of Cambridge, Cambridge CB3 0HE;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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1. AMPLIFICATION MEASUREMENTS OF ALTERNATIVE IMAGING GASES IN ENVIRONMENTAL SEM [J] . Fletcher AL., Donald AM., Thiel BL. Journal of Physics, D. Applied Physics: A Europhysics Journal . 1997,第15期

机译：环境SEM中交替成像气的放大测量
2. Environmental SEM for medical devices - An interview with ESEM expert, Scott Robinson - Environmental SEM is a useful tool for examining delicate, vacuum-sensitive specimens [J] . Angele Sjong Advanced Materials & Processes . 2009,第4期

机译：医疗设备的环境SEM-ESEM专家Scott Robinson访谈-环境SEM是检查精密，对真空敏感的标本的有用工具
3. Evaluation of depth of field in SEM images in terms of the information-passing capacity (IPC) and contrast gradient in SEM image [J] . Mitsugu Sato, Tohru Ishitani, Shunya Watanabe, Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment . 2004,第1a2期

机译：根据信息传递能力（IPC）和SEM图像中的对比度梯度评估SEM图像中的景深
4. Imaging properties of various gases in the environmental SEM [C] . B Thiel, Institute of Physics, Conference Series Number 168 Institute of Physics Electron Microscopy and Analysis Group conference . 2001

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机译：辉光放电环境兴趣气体的等离子体性质

Imaging properties of various gases in the environmental SEM

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