Three-dimensional STEM with nm-scale spatial resolution

机译：具有纳米级空间分辨率的三维STEM

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A new STEM instrument has been developed for three-dimensional (3D) electron microscopy for nano-structures. For accurate eucentric rotation, a new specimen stage with double spherical fulcra was developed. Cylindrical specimens for 3D observation were prepared by the micro-sampling technique using a focused ion beam. Copper damascene of a semiconductor memory device and ZnO particles were observed by the 3D STEM from various directions, and the 3D images were well reconstructed in topography/tomography modes.

机译：已经开发出一种用于纳米结构的三维（3D）电子显微镜的新型STEM仪器。为了精确地进行同心旋转，开发了具有双球形spherical骨的新样品台。使用聚焦离子束，通过微采样技术制备了用于3D观察的圆柱样品。通过3D STEM从各个方向观察到半导体存储器件的铜大马士革和ZnO颗粒，并以形貌/断层扫描模式很好地重建了3D图像。

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来源
《Institute of Physics Electron Microscopy and Analysis Group Conference, Sep 5-7, 2001, Dundee》|2001年|p.159-162|共4页
会议地点 Dundee(GB);Dundee(GB)
作者
N Tanaka; Y Murooka; M Koguchi; H Kakibayashi; R Tsuneta; K Kase; M Iwaki;
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作者单位

Department of Applied Physics, Nagoya University, Nagoya 464-8603;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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Three-dimensional STEM with nm-scale spatial resolution

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