3D reconstruction of surface and subsurface structures of solids by SEM stereo images

机译：通过SEM立体图像对固体的表面和亚表面结构进行3D重建

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摘要

The stereo method in SEM, implying the investigation of several images of the same region, allows to obtain the exact quantitative three-dimensional information on solid microrelief characteristics. The method is realized in the specialized PC software "STERECON" aimed to carry out an efficient SEM stereo image analysis resulting in a 3D digital model of the surface and sub-surface structures under investigation.

机译：SEM中的立体方法，意味着研究同一区域的几幅图像，可以获取有关固体微浮雕特征的精确定量三维信息。该方法在专门的PC软件“ STERECON”中实现，该软件旨在进行有效的SEM立体图像分析，从而得到所研究的表面和亚表面结构的3D数字模型。

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来源
《Institute of Physics Electron Microscopy and Analysis Group Conference, Sep 5-7, 2001, Dundee》|2001年|p.119-122|共4页
会议地点 Dundee(GB);Dundee(GB)
作者
V.N.Sokolov; D.IYurkovets; V.N.Melnik; A.Boyde; P.G.T.Howell;
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作者单位

Lomonosov Moscow State University, Moscow, 117899, Russia;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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专利

1. 3D Reconstruction of Rough Surfaces by SEM Stereo Imaging [J] . Jean-Louis Pouchou, Denis Boivin, Pierre Beauchêne, Microchimica Acta . 2002,第1a4期

机译：通过SEM立体成像对粗糙表面进行3D重建
2. 3D Reconstruction of Rough Surfaces by SEM Stereo Imaging [J] . Jean-Louis Pouchou, Denis Biovin, Pierre Beauchene, Mikrochimica Acta: An International Journal for Physical and Chemical Methods of Analysis . 2002,第1a4期

机译：通过SEM立体成像对粗糙表面进行3D重建
3. 3D Stereo Reconstruction of SEM Images [J] . J. C. Henao-Londo?o, J. C. Ria?o-Rojas, J. B. Gómez-Mendoza, Modern Applied Science . 2018,第12期

机译：SEM图像的3D立体重建
4. 3D reconstruction of surface and subsurface structures of solids by SEM stereo images [C] . V.N.Sokolov, D.IYurkovets, V.N.Melnik, Institute of Physics Electron Microscopy and Analysis Group conference . 2001

机译：SEM立体声图像的3D改建静脉表面和地下结构
5. 3D SEM Surface Reconstruction from Multi-view Images [D] . Rehman, Waleedur ur. 2018

机译：来自多视图图像的3D SEM表面重建
6. Corrigendum to A large dataset of synthetic SEM images of powder materials and their ground truth 3D structures Data Brief 9 (2016) 727–731 [O] . Brian L. DeCost, Elizabeth A. Holm 2018

机译：关于粉末材料及其地面真实3D结构的合成SEM图像的大型数据集的更正数据摘要9（2016）727–731
7. 3D Stereo Reconstruction of SEM Images [O] . J. C. Henao-Londoño, J. C. Riaño-Rojas, J. B. Gómez-Mendoza, 2018

机译：SEM图像的3D立体声重建
8. Nondestructive SEM for surface and subsurface wafer imaging [R] . Propst, Roy H., Bagnell, C. Robert, Cole, Edward I., Jr., 1987

机译：用于表面和次表面晶圆成像的非破坏性sEm

3D reconstruction of surface and subsurface structures of solids by SEM stereo images

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