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首页> 外文会议>International Conference on Advanced Microsystems for Automotive Applications(AMAA); 20030522-20030523; Berlin; DE >A Low-g Accelerometer for Inertial Measurement Units
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A Low-g Accelerometer for Inertial Measurement Units

机译：用于惯性测量单元的低重力加速度计

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摘要

Inertial Measurement Units (IMU) for upcoming automotive chassis control systems require sensor clusters with multi-axial sensors for acceleration and angular rate. In this paper, we present a low-g accelerometer that fits the IMU requirements for advanced automotive applications and is capable of monolithic multiple-axes integration. For the target application a high offset stability and an over-critical damping of the sensing element are required. With simple design changes the squeezed-film damping of the sensor can be adjusted within a wide range (5Hz to 400Hz) using atmospheric pressure inside the cavity. Due to its symmetrical design and the differential readout principle, an offset drift of less than 50mg over the full temperature range (-40℃...120℃) was achieved. The sensor principle presented in this paper can be utilized to realize a sensitivity axis parallel to the wafer surface as well as perpendicular to the surface. Furthermore, monolithic integration into a two-axis (x/z) or a three-axis (x/y/z) sensing element is possible. The tri-axial element exhibits a four-mass design providing redundancy and thus an ongoing self-test capability.
机译：用于即将推出的汽车底盘控制系统的惯性测量单元（IMU）需要带有多轴传感器的传感器组，以实现加速度和角速度。在本文中，我们提出了一种低g加速度计，该加速度计符合IMU对高级汽车应用的要求，并且能够进行单片多轴集成。对于目标应用，需要高偏置稳定性和传感元件的超临界阻尼。通过简单的设计更改，可以使用空腔内的大气压在很宽的范围（5Hz至400Hz）内调节传感器的挤压膜阻尼。由于其对称的设计和差分读出原理，在整个温度范围内（-40℃... 120℃），偏移漂移小于50mg。本文提出的传感器原理可用于实现平行于晶片表面以及垂直于晶片表面的灵敏度轴。此外，可以单片集成到两轴（x / z）或三轴（x / y / z）传感元件中。三轴元件具有四质量设计，可提供冗余并因此具有持续的自检功能。

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