Study on the Temperature Field of Cemented Carbide Substrate in Miniature EACVD System

机译：微型EACVD系统中硬质合金基片温度场的研究。

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The uniform distribution and the stability of the substrate temperature are the most important factors that deeply affect the quality and the growth rate of diamond films. In this paper, cemented carbide cutters were chosen for substrates, the 3D finite element (FE) model of filaments and substrates was developed in ANSYS 8.0, the calculated results show that the substrate temperature is influenced by the filament temperature, filaments diameter, the quantity of the filaments and the distance between the filaments and the substrates. The 3D finite element model of filaments and substrates also provides a basis for selecting the parameters to obtain uniform diamond films in miniature EACVD system.

机译：衬底温度的均匀分布和稳定性是影响金刚石膜质量和生长速度的最重要因素。本文选择硬质合金刀具作为基体，在ANSYS 8.0中开发了细丝和基体的3D有限元模型，计算结果表明基体温度受细丝温度，细丝直径，数量的影响。丝的长度以及丝与基底之间的距离。细丝和基材的3D有限元模型还为选择参数以在微型EACVD系统中获得均匀的金刚石膜提供了基础。

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来源
《International Conference on Advances in Machining amp; Manufacturing Technology in China; 20070816-19; Harbin(CN)》|2007年|P.525529|共2页
会议地点 Harbin(CN)
作者
Hongxiang Wang; Dunwen Zuo; Wenzhuang Lu; Feng Xu; Dang Zeng; Jianliang Shen;
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作者单位

College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics Astronautics, Nanjing, China;

Department of Mechanical and Electrical Engineering, Huaian College of Information Technology, Huaian, China;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械制造工艺;
关键词
miniature EACVD system; cemented carbide tools; diamond films; substrate temperature field; FE;

机译：微型EACVD系统；硬质合金刀具；金刚石膜；基板温度场；有限元;

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专利

1. Study on the Temperature Field of Cemented Carbide Substrate in Miniature EACVD System [J] . Hongxiang Wang, Dunwen Zuo, Wenzhuang Lu, Key Engineering Materials . 2008,第期

机译：微型EACVD系统中硬质合金基片温度场的研究。
2. Modeling and Analyzing the Temperature Field of the Swing Substrate in Miniature EACVD System [J] . Hongxiang Wang, rnDunwen Zuo, rnWenzhuang Lu, Key Engineering Materials . 2010,第期

机译：微型EACVD系统中摆动基片温度场的建模与分析
3. Effects of sintering temperature on the densification of WC-6Co cemented carbides sintered by coupled multi-physical-fields activated technology [J] . Yu Zhou, Yi Yang, Gang Yang, Manufacturing Review . 2015,第a期

机译：烧结温度对耦合多物理场激活技术烧结WC-6Co硬质合金致密的影响
4. Study on the Temperature Field of Cemented Carbide Substrate in Miniature EACVD System [C] . Hongxiang Wang, Dunwen Zuo, Wenzhuang Lu, International Conference on Advances in Machining Manufacturing Technology in China . 2008

机译：微型EACVD系统中硬质合金基质温度场的研究
5. Near-field photocurrent studies of temperature and polarization dependence in relaxed silicon germanium films on silicon substrates. [D] . Gray, Matthew Herbert. 2002

机译：近场光电流研究了硅基板上弛豫的硅锗薄膜中温度和极化相关性。
6. Influence of Cemented Carbide Composition on Cutting Temperatures and Corresponding Hot Hardnesses [O] . Anne Vornberger, Tobias Picker, Johannes Pötschke, 2020

机译：硬质合金组合物对切割温度和相应热硬度的影响
7. Study on Substrate Temperature Field during Its Swing Movement in Miniature HFCVD System [O] . D. W. Zuo, D. Zeng, H. X. Wang, 2015

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8. Study of the Influence of the Temperature of the Substrate on the Construction of Bonded Portland Cement Concrete Overlays [R] . Koesno, S., Papaleontiou, C. G., Meyer, A. H., 1988

机译：基层温度对粘结水泥混凝土保温层施工影响的研究

Study on the Temperature Field of Cemented Carbide Substrate in Miniature EACVD System

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