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MEMS Solutions for Precision Micro-Fluidic Dispensing Application

机译:适用于精密微流体点胶应用的MEMS解决方案

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摘要

Customer demands for increased performance within the precision micro-fluidic markets, including high image quality printing, can be satisfied by designing piezo-electrically actuated inkjet printhead modules with single crystal silicon Micro-Electro-Mechanical (MEMS) manufacturing process-es. The result is a highly flexible design and manufacturing space. This combination allows the efficient development of a high quality product family capable of servicing a broad range of printing applications in addition to pushing "inkjet technology" into the more generalized precision liquid dispensing application space. The following text describes current performance drivers in the precision micro-fluidic market and a MEMS based, bending mode, piezoelectrically actuated inkjet module, (the Spectra, Inc. M-Class) designed to meet these evolving needs. In addition, the inherent performance and manufacturing flexibility of the associated product family is highlighted.
机译:通过设计具有单晶硅微机电(MEMS)制造工艺的压电致动喷墨打印头模块,可以满足客户对精密微流体市场中提高性能的需求,包括高质量的图像打印。结果是高度灵活的设计和制造空间。这种组合不仅可以将“喷墨技术”推向更通用的精密液体分配应用空间,而且还可以有效开发高质量的产品系列,该系列产品可以为广泛的印刷应用提供服务。下文描述了精密微流体市场中的当前性能驱动因素,以及旨在满足这些不断发展的需求的基于MEMS的弯曲模式压电致动喷墨模块(Spectra,Inc. M-Class)。此外,强调了相关产品系列的固有性能和制造灵活性。

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