Novel calibration techniques and applications for touch probes with nanometre accuracy

机译：纳米精度的测头的新型校准技术和应用

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

In the application of ultra-precision touch probe systems, calibration is critical to obtain the desired accuracy (< 50 nm). The geometry of the probe tip needs to be calibrated for use on ultra-precision CMMs. A novel approach for absolute diameter calibration is presented. Ultra-precision probes can also be used in other applications, such as machine calibration. This paper presents a system for accurate calibration of small multi-axis machines, using a new artefact in combination with these probes.

机译：在超精密测头系统的应用中，校准对于获得所需的精度（<50 nm）至关重要。探针的几何形状需要进行校准，以用于超精密CMM。提出了一种用于绝对直径校准的新颖方法。超精密探头还可以用于其他应用，例如机器校准。本文提出了一种使用新的人工制品和这些探头组合的小型多轴机床的精确校准系统。

著录项

来源
《International Conference of the European Society for Precision Engineering and Nanotechnology vol.1; 20060528-0601; Vienna(AT)》|2006年|386-389|共4页
会议地点 Vienna(AT)
作者
H.A.M. Spaan; I. Widdershoven; M.A.A. Morel;
展开▼
作者单位

IBS Precision Engineering, Eindhoven, The Netherlands;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类特种结构材料;
关键词

相似文献

外文文献
中文文献
专利

1. Advancements in Techniques for Calibration and Characterization of In Situ Optical Particle Measuring Probes, and Applications to the FSSP-100 Probe [J] . Dagmar Nagel, Uwe Maixner, Walter Strapp, Journal of atmospheric and oceanic technology . 2007,第5期

机译：原位光学粒子测量探针的校准和表征技术的进展及其在FSSP-100探针中的应用
2. Calibration of displacement sensors up to 300 μm with nanometre accuracy and direct traceability to a primary standard of length [J] . H. Haitjema, P. H. J. Schellekens, S. F. C. L. Wetzels Metrologia: International Journal of Scientific Metrology: = Internationale Zeitschrift fur Wissenschaftliche Metrologie: = Journal International de Metrologie Scientifique . 2000,第1期

机译：校准高达300μm的位移传感器，具有纳米精度，并可直接追溯到长度的主要标准
3. Dynamic Accuracy Suvey of the New 'Single Plane - Single Frame 3-D Calibration' Technique for use in Biomedical Applications [J] . O. A. Schmid Biomedizinische Technik . 2005,第3期

机译：用于生物医学应用的新型“单平面-单帧3D校准”技术的动态精度调查
4. Novel calibration techniques and applications for touch probes with nanometre accuracy [C] . H.A.M. Spaan, I. Widdershoven, M.A.A. Morel International Conference of the European Society for Precision Engineering and Nanotechnology vol.1; 20060528-0601; Vienna(AT) . 2006

机译：纳米精度的测头的新型校准技术和应用
5. Calibration of Hot-Film X-Probes for High Accuracy Angle Alignment in Wind Tunnels [D] . Jackson, Dallin L. 2019

机译：校准风隧道高精度角度对准的热膜X探针
6. A 1.15 μW 200 kS/s 10-b Monotonic SAR ADC Using Dual On-Chip Calibrations and Accuracy Enhancement Techniques [O] . Jae-Hun Lee, Dasom Park, Woojin Cho, 2018

机译：采用双重片内校准和精度增强技术的1.15μW200 kS / s 10-b单调SAR ADC
7. Accuracy Comparison between Techniques for the Establishment of Calibration Intervals: Application to Atomic Clocks [O] . Macii David, Tavella Patrizia, Perone Elena, 2004

机译：建立校准间隔的技术之间的精度比较：应用于原子钟
8. Science of and Advanced Technology for Cost-Effective Manufacture of High Precision Engineering Products. Volume 6. Accuracy Improvement of a CNC Machining Center by Using a Touch Probe and a Metrology Pallet [R] . Lee, S., Barash, M. M. 1986

机译：高成本工程产品成本效益制造的科学与先进技术。第6卷。使用触摸探针和计量托盘改善CNC加工中心的精度

Novel calibration techniques and applications for touch probes with nanometre accuracy

摘要

著录项

相似文献

相关主题

期刊订阅