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首页> 外文会议>International Conference on Mechanical Engineering and Mechanics vol.1; 20051026-28; Nanjing(CN) >Robust Control for Nano-drive Parts Based on Riccati Equation
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Robust Control for Nano-drive Parts Based on Riccati Equation

机译：基于Riccati方程的纳米驱动零件鲁棒控制

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摘要

This paper addresses the problem of robust H_∞ control basing on observer for an uncertain system, which is used to control nano-drive parts with large feeding force. As the controlled object, the nano-drive part is a kind of nanometer precision feed-drive part that is symmetry structure and based on semiconductor refrigerator. Firstly, the temperature field can be changed through controlling the double sides-semiconductor refrigerator, then deformation field can be controlled according to thermal expansion and cold contraction principle, thus the nanometer precision feeding of z direction is realized. Basiced on algebraic Riccati equation, a designing scheme is presented, which is to make the problem of robust quadratic stabilization for norm-bounded uncertain systems equal to the H_∞ control problem for linear time-invariant systems without any uncertain parameters and makes the design closed-loop system still keep quadratic stability having H_∞ norm-bounded for all admission parameter uncertainties. Finally, six sets of experimental data are given. Then, the state-space expression is achieved by making use of the data to fit exponential curve in MATLAB fit-toolbox. The mathematical model is established under some condition. The usefulness and accuracy of results are also verified. The results show the obvious function of using robust control.
机译：本文基于不确定系统的观测器，解决了鲁棒H_∞控制的问题，该系统用于控制具有大进给力的纳米驱动零件。作为受控对象，纳米驱动部分是一种对称结构的基于半导体制冷机的纳米精密进给驱动部分。首先通过控制双面半导体制冷机来改变温度场，然后根据热膨胀和冷收缩原理来控制变形场，从而实现z方向的纳米精密进给。提出了一种基于代数Riccati方程的设计方案，该方案使范数有界不确定系统的鲁棒二次稳定问题等于线性时不变系统的H_∞控制问题，并且没有任何不确定参数，并使设计闭合环系统对于所有准入参数不确定性仍保持H_∞范数有界的二次稳定性。最后，给出了六组实验数据。然后，通过使用数据拟合MATLAB fit-toolbox中的指数曲线来获得状态空间表达式。在一定条件下建立数学模型。还验证了结果的实用性和准确性。结果表明，使用鲁棒控制具有明显的功能。

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