首页> 外文会议>International Conference on Mechanical Engineering and Mechanics vol.1; 20051026-28; Nanjing(CN) >Passivity-Based Geometric Control with Application to Electrostatically-Actuated Microsystems
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Passivity-Based Geometric Control with Application to Electrostatically-Actuated Microsystems

机译:基于被动性的几何控制在静电微系统中的应用

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Passivity-based geometric methods are a powerful approach to the control of systems modeled by Euler-Lagrange equations. This paper presents an overview of the application of passivity-based geometric control to electrostatically-actuated microelectromechanical systems (MEMS). We summarize recent relevant advances in geometric stabilization and tracking, we present a general model of electrostatic forcing specifically tailored to passivity-based control, we describe sensing strategies suited to MEMS implementation, and we describe preliminary finite-element and experimental results. Finally, challenges associated with extension of the approach to nano electromechanical systems (NEMS) are examined.
机译:基于被动性的几何方法是控制由Euler-Lagrange方程建模的系统的强大方法。本文概述了基于无源的几何控制在静电驱动微机电系统(MEMS)中的应用。我们总结了几何稳定和跟踪方面的最新进展,提出了专门针对基于无源性控制的静电强迫的一般模型,描述了适用于MEMS实现的传感策略,并描述了初步的有限元和实验结果。最后,研究了与将方法扩展到纳米机电系统(NEMS)相关的挑战。

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