首页> 外文会议>International Conference on Mechanical Engineering and Mechanics vol.2; 20051026-28; Nanjing(CN) >Slip Model for Gas Film Lubrication of the Slider Bearing in an Electrostatic Micro-motor
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Slip Model for Gas Film Lubrication of the Slider Bearing in an Electrostatic Micro-motor

机译:静电微电机中滑动轴承气膜润滑的滑动模型

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This paper develops a new slip model incorporating molecular dynamics to investigate the molecular gas film lubrication of the slider bearing beneath the micro-motor bushings. Modified Reynolds equation based on the modified VHS and VSS slip models is proposed. Analytical solutions are obtained and compared with the results gained from Burgdorfer's first-order, Hsia's second-order, Mitsuya's 1.5-order slip models, Fukui's AAS and Chen's MMGL show that the new model agrees reasonably well with the results gained from 1.5-order slip model. It is showed that the new model is of greater accuracy than that predicted by the first-order, second-order slip models and AAS but new physical interpretations using molecular dynamics have been included in this model. It is indicated that the slip effect reduces the pressure distribution and load carrying capacity, which should not be ignored to study the step microbearing in micro-motors in MEMS.
机译:本文开发了一种结合了分子动力学的新滑模模型,以研究微电机衬套下方的滑动轴承的分子气膜润滑。提出了基于修正的VHS和VSS滑移模型的修正的雷诺方程。获得了解析解并将其与从Burgdorfer的一阶,Hsia的二阶,Mitsuya的1.5阶滑移模型,Fukui的AAS和Chen的MMGL所获得的结果进行了比较,表明新模型与从1.5阶滑移获得的结果相当吻合模型。结果表明,该新模型比一阶,二阶滑移模型和AAS预测的精度更高,但是该模型包括了使用分子动力学的新物理解释。结果表明,滑移效应会减小压力分布和承载能力,这对于研究MEMS微电机中的步进微轴承是不容忽视的。

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