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首页> 外文会议>International Conference on Mechanical Engineering and Mechanics vol.2; 20051026-28; Nanjing(CN) >Simulation and Fabrication of an Electromagnetic Bistable MEMS Microactuator
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Simulation and Fabrication of an Electromagnetic Bistable MEMS Microactuator

机译：电磁双稳态MEMS微执行器的仿真与制作

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摘要

An electromagnetic MEMS microactuator with two stable positions is simulated and fabricated. The proposed structure for the microactuator consists of a soft magnetic cantilever beam with two free ends, a soft magnetic torsional beam with two fixed ends, double-layer planar coils and permanent magnets. With the electromagnetic actuation arising from the planar coils, the cantilever beam will switch from one stable position to the other. The cantilever beam has two stable positions due to the use of the permanent magnets. The designed microactuator is simulated by the finite element method, using the ANSYS 7.0 software. The working mechanism for the bistability of the microactuator is analyzed. The device with the size of 2.2mm X 2.5mm is fabricated by UV-LIGA technology. The result of test shows that the switching between two stable states is successfully represented by a current pulse with about 50mA amplitude through the integrated coils in agreement with the result of simulation.
机译：模拟并制造了具有两个稳定位置的电磁MEMS微致动器。所提议的用于微致动器的结构包括具有两个自由端的软磁悬臂梁，具有两个固定端的软磁扭转梁，双层平面线圈和永磁体。由于平面线圈产生电磁致动，悬臂梁将从一个稳定位置切换到另一稳定位置。由于使用了永磁体，因此悬臂梁具有两个稳定的位置。使用ANSYS 7.0软件，通过有限元方法对设计的微执行器进行仿真。分析了微致动器双稳态的工作机理。该器件的尺寸为2.2mm X 2.5mm，采用UV-LIGA技术制造。测试结果表明，两个稳态之间的切换成功地通过集成线圈中振幅约为50mA的电流脉冲来表示，与仿真结果一致。

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