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首页> 外文会议>International conference on mechatronics technology >Lens Positioning Control by a Magnetic/Aerostatic Hybrid Actuator for Off-Axis Laser Beam Cutting
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Lens Positioning Control by a Magnetic/Aerostatic Hybrid Actuator for Off-Axis Laser Beam Cutting

机译：用于离轴激光束切割的电磁/气动混合执行器控制镜头位置

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摘要

This paper describes a magnetic/aerostatic hybrid lens drive actuator to realize off-axis laser beam cutting.In off-axis cutting,the distance between the assist gas nozzle axis and the laser beam axis is rapidly and widely controlled in order to improve the capability for the removal of molten material by the assist gas jet.The proposed actuator supports a triangularshaped lens holder with three air bearings,and drives it in two translational and one rotational directions using three pairs of electromagnets.In order to realize stable positioning of the lens holder over a wide range and to cancel the inertial force working on the lens holder while the actuator body is accelerated and decelerated together with the laser cutting machine head,a combination of a partial-bias method,a variable current feedback gain method and a disturbance compensation method is proposed.Experimental results show that the prototype actuator possesses a positioning stroke of ±1 mm within 2 μm of tracking error and bandwidths of nearly 90 Hz in the controlled directions.Under acceleration conditions of ±4 G,the actuator maintains the relative displacement between the lens holder and the actuator body to within 30μm.
机译：本文描述了一种实现离轴激光束切割的磁/空气混合透镜驱动致动器。在离轴切割中，快速，广泛地控制辅助气体喷嘴轴与激光束轴之间的距离以提高性能所提出的执行器支撑一个带有三个空气轴承的三角形透镜支架，并使用三对电磁体在两个平移和一个旋转方向上驱动它。以便实现透镜的稳定定位偏摆法，可变电流反馈增益法和干扰法的组合，可消除大范围的夹具，并消除与激光切割机头一起使致动器本体加速和减速时作用在镜片夹具上的惯性力实验结果表明，样机执行器在跟踪误差2μm内的定位行程为±1mm。 r和在受控方向上接近90 Hz的带宽。在±4 G的加速条件下，执行器将镜头支架与执行器主体之间的相对位移保持在30μm以内。

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