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首页> 外文会议>International conference on mechatronics technology >Lens Positioning Control by a Magnetic/Aerostatic Hybrid Actuator for Off-Axis Laser Beam Cutting
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Lens Positioning Control by a Magnetic/Aerostatic Hybrid Actuator for Off-Axis Laser Beam Cutting

机译：镜头定位控制通过磁/静止混合动力致动器进行轴外激光束切割

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摘要

This paper describes a magnetic/aerostatic hybrid lens drive actuator to realize off-axis laser beam cutting.In off-axis cutting,the distance between the assist gas nozzle axis and the laser beam axis is rapidly and widely controlled in order to improve the capability for the removal of molten material by the assist gas jet.The proposed actuator supports a triangularshaped lens holder with three air bearings,and drives it in two translational and one rotational directions using three pairs of electromagnets.In order to realize stable positioning of the lens holder over a wide range and to cancel the inertial force working on the lens holder while the actuator body is accelerated and decelerated together with the laser cutting machine head,a combination of a partial-bias method,a variable current feedback gain method and a disturbance compensation method is proposed.Experimental results show that the prototype actuator possesses a positioning stroke of ±1 mm within 2 μm of tracking error and bandwidths of nearly 90 Hz in the controlled directions.Under acceleration conditions of ±4 G,the actuator maintains the relative displacement between the lens holder and the actuator body to within 30μm.
机译：本文介绍了一种磁性/空气静止混合透镜驱动致动器，实现轴外激光束切削。在轴上切割，辅助气体喷嘴轴和激光束轴之间的距离快速和广泛控制，以提高能力用于通过辅助气体喷射去除熔融材料。该提出的致动器支撑有三个空气轴承的三角形镜头座，并使用三对电磁铁在两个平移和一个旋转方向上驱动。在顺序中以实现透镜的稳定定位在宽范围内的支架和取消在镜头支架上工作的惯性力，而致动器主体与激光切割机头一起加速和减速，部分偏置方法的组合，可变电流反馈增益法和干扰提出了补偿方法。实验结果表明，原型致动器在2μm的跟踪Erro内具有±1mm的定位行程在受控方向上的r和带宽近90赫兹。加速条件下±4g，致动器将透镜支架和致动器体之间的相对位移保持在30μm。

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