Ion flux in a capacitively coupled rf discharge in NF_3

机译：NF_3电容耦合射频放电中的离子通量

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Starting from a phenomenological model yielding the self-bias voltage as a function of the absorbed radio-frequency (rf) power of an asymmetric capacitively coupled discharge in NF_3 we study the dependence of the ion flux onto the powered electrode on the gas pressure. Solving numerically the model's basic equations we are able to extract the magnitude of the ion flux (at three different gas pressures) in a technological etching device (Alcatel GIR 220) by using easily measurable quantities, notably the self-bias voltage and absorbed rf power.

机译：从产生自偏置电压的现象模型开始，该自偏置电压是NF_3中非对称电容耦合放电吸收的射频（rf）功率的函数，我们研究了离子通量对有源电极上气压的依赖性。通过数值求解模型的基本方程，我们能够通过使用易于测量的量（特别是自偏置电压和吸收的rf功率）来提取技术蚀刻设备（阿尔卡特GIR 220）中的离子通量（在三种不同的气压下）。

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《International Conference on Phenomena in Ionized Gases(ICPIG 2003) vol.1; 20030715-20; Greifswald(DE)》|2003年|P.75-76|共2页
会议地点 Greifswald(DE)
作者
E. Mateev; I. Zhelyazkov;
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作者单位

Institute of Electronics, Bulgarian Academy of Sciences, BG-1784 Sofia, Bulgaria;

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原文格式 PDF
正文语种 eng
中图分类天然气加工;
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2. On singlet metastable states, ion flux and ion energy in single and dual frequency capacitively coupled oxygen discharges [J] . Hannesdottir H., Gudmundsson J. T. Journal of Physics, D. Applied Physics: A Europhysics Journal . 2017,第17期

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3. Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring [J] . T. Lafleur, P. A. Delattre, E. V. Johnson, Applied Physics Letters . 2012,第12期

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4. Ion flux in a capacitively coupled rf discharge in NF_(3) [C] . E. Mateev, I. Zhelyazkov, ICPIG International Conference on Phenomena in Ionized Gases . 2003

机译：在NF_（3）中电容耦合的RF放电中的离子通量
5. Modeling discharge and surface processes in capacitively coupled reactors. [D] . Yang, Yang. 2010

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6. Capacitively Coupled Plasma Discharge of Ionic Liquid Solutions to Synthesize Carbon Dots as Fluorescent Sensors [O] . Ching-Bin Ke, Te-Ling Lu, Jian-Lian Chen 2018

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7. Heat flux distribution on a substrate in capacitively coupled radio-frequency discharges [O] . Takaki, K., Kosek, D., Fujiwara, T. 2002

机译：电容耦合射频放电中基板上的热通量分布

Ion flux in a capacitively coupled rf discharge in NF_3

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