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Long life mechanism on a flexible fiber conditioner in CMP

机译:CMP中的柔性纤维改良剂的长寿命机理

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A flexible fiber conditioner was developed as a surface reference conditioning tool in CMP (Chemical Mechanical Planarization) process. The conditioner keeps contact force of each fiber edge constant to the pad by making use of fiber bending effect. In this paper, the running test was evaluated using the flexible fiber conditioner. The result indicated that the fiber conditioner achieved long life polishing rate and cutting rate in spite of round shape of fiber edge by fiber edge wear. The long life mechanism was verified in terms of a rake angle of a cutting edge of fiber edge. It was verified that the fiber conditioner continues to roughen the pad surface due to small negative rake angle and small cutting width.
机译:在CMP(化学机械平面化)过程中,开发了一种柔性纤维调节剂作为表面参考调理工具。调节器通过利用纤维弯曲作用使每个纤维边缘对垫的接触力保持恒定。在本文中,使用柔性纤维改良剂对运行测试进行了评估。结果表明,尽管由于纤维边缘磨损而使纤维边缘呈圆形,但该纤维修整剂仍实现了长寿命的抛光速率和切割速率。通过纤维边缘的切削刃的前角证实了长寿命机理。可以证明,由于负前角小和切割宽度小,纤维调节剂继续使垫表面变粗糙。

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