首页> 外文会议>International Conference on Progress of Machining Technology (ICPMT'2002) : With Some Topics in Advanced Manufacturing Technology; 20020910-14; Xi'an(CN) >Surface Integrity and Machining Quality Study of the Sub-surface Characteristics of ELID-ground Single Crystal Silicon

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Surface Integrity and Machining Quality Study of the Sub-surface Characteristics of ELID-ground Single Crystal Silicon

机译：ELID研磨单晶硅的亚表面特性的表面完整性和加工质量研究

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《International Conference on Progress of Machining Technology (ICPMT'2002) : With Some Topics in Advanced Manufacturing Technology; 20020910-14; Xi'an(CN)》|2002年|616-621|共6页
会议地点 Xian(CN)
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正文语种 eng
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