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首页> 外文会议>International Manufacturing Conference in China; 20060921-23; Xi'an(CN) >Experimental Study of Micro-flowing Characteristics of Liquid Transport in Round Micro-channels
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Experimental Study of Micro-flowing Characteristics of Liquid Transport in Round Micro-channels

机译：圆形微通道内液体传输的微流特性实验研究

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摘要

Micro-flowing technique gained popular applications in microdevices of microelectro-mechanical systems (MEMS), and the performance of micro-devices is greatly determined by the properties of micro-flow. This paper studied the characteristics of different viscosity fluid flowing over microchannels with different diameters and lengths under low pressure driving, and the influence of scale effects on the flowing characteristics of low viscosity fluids was also examined. The experiments studied the flow rate-pressure characteristics of distilled water flowing over microchannels with diameter of 13 μm, 20 μrn, and silicon oil flowing over microchannels with diameters of 50 μm, 100 μm. The results indicate that, when the diameter of micro-channel is more than 20 μm, the flowing characteristics of distilled water and silicon oil agrees well with conventional flow theory, and when the diameter of microchannels is 13μm, the flowing characteristics are related to the length of micro-channel. When the length is relatively shorter, the flowing characteristics are almost in agreement with the conventional flow theory. When the length reaches 100 mm, the flow rate is much higher than the values predicted by theoretical calculation when the length reaches 100 mm. It is obvious that scale effect arises when the length arrives to 100 mm and the velocity slippage results in the great increase of flow rate.
机译：微流技术在微机电系统（MEMS）的微器件中获得了广泛的应用，并且微器件的性能在很大程度上取决于微流的特性。本文研究了低压驱动下不同粘度和直径的微通道中不同粘度流体的流动特性，并研究了尺度效应对低粘度流体流动特性的影响。实验研究了流经直径为13μm，20μm的微通道的蒸馏水和流经直径为50μm，100μm的微通道的硅油的流速-压力特性。结果表明，当微通道直径大于20μm时，蒸馏水和硅油的流动特性与常规流动理论吻合良好；当微通道直径为13μm时，流动特性与微通道的流动性有关。微通道的长度。当长度相对较短时，流动特性几乎与常规流动理论一致。当长度达到100 mm时，流量远高于通过理论计算预测的值（当长度达到100 mm时）。显而易见的是，当长度达到100 mm时会出现水垢效应，而速度滑移会导致流量大大增加。

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